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公开(公告)号：DE2231598A1
公开(公告)日：1973-02-08
申请号：DE2231598
申请日：1972-06-28
Applicant: IBM
Inventor： GOLDMANN LEWIS SIGMUND , JEANNOTTE DEXTER ANTHONY , KRALL BOGDAN
IPC: G01N13/02
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公开(公告)号：DE2424857A1
公开(公告)日：1975-01-16
申请号：DE2424857
申请日：1974-05-22
Applicant: IBM
Inventor： HERDZIK RICHARD JOSEPH , JEANNOTTE DEXTER ANTHONY , PETERSON GERALD WILLIAM , SULLIVAN MICHAEL JAMES
IPC: H01L21/60 , H01L23/485 , H05K3/36
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