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公开(公告)号:JPS58192035A
公开(公告)日:1983-11-09
申请号:JP4461983
申请日:1983-03-18
Applicant: Ibm
Inventor: MAIKERU HATSUTOZAKISU , JIYON JIYOSEFU RIYUUTOKASU , JIYURIJI ROSUTEISURABU PARAZUK , JIEEN MAAGARETSUTO SHIYAU
IPC: G03F7/26 , C08F12/00 , C08F12/16 , G03F7/038 , H01L21/027
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公开(公告)号:JPH0661597A
公开(公告)日:1994-03-04
申请号:JP24157292
申请日:1992-09-10
Applicant: IBM
Inventor: ARI AFUZARIIARUDAKANI , BODEIRU ERISABESU BUREIREN , SHIYAAROKU DAIJIYABUA , RODONII TOREBOO HODOSON , SUTEIIBUN AARU MORISU , ARUFURETSUDO BIIBETSUKU , ASHITSUTO AABINDO MEETA , SUTEFUAN REO TEISUDEERU , JIEFURII KAATEISU HEDORITSUKU , JIEEN MAAGARETSUTO SHIYAU , ERIZABESU FUOSUTAA , JIYUAN AYARAESUKUIRIN , JIEMUSU RUPUTON HEDORITSUKU JI
Abstract: PURPOSE: To obtain a composite material which allows the physical properties of a polymer material to be changed. CONSTITUTION: This material contains a composite materials of a fluorinated granular carbon dispersed in a polymer material and conductor pattern. The fluorocarbon content of the composite material is enough to make the dispersed content. of the composite material lower than that of the polymer material. The composite material can be made conductive by irradiating with an UV excimer laser.
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