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公开(公告)号：JPH0661597A
公开(公告)日：1994-03-04
申请号：JP24157292
申请日：1992-09-10
Applicant: IBM
Inventor： ARI AFUZARIIARUDAKANI , BODEIRU ERISABESU BUREIREN , SHIYAAROKU DAIJIYABUA , RODONII TOREBOO HODOSON , SUTEIIBUN AARU MORISU , ARUFURETSUDO BIIBETSUKU , ASHITSUTO AABINDO MEETA , SUTEFUAN REO TEISUDEERU , JIEFURII KAATEISU HEDORITSUKU , JIEEN MAAGARETSUTO SHIYAU , ERIZABESU FUOSUTAA , JIYUAN AYARAESUKUIRIN , JIEMUSU RUPUTON HEDORITSUKU JI
Abstract: PURPOSE: To obtain a composite material which allows the physical properties of a polymer material to be changed. CONSTITUTION: This material contains a composite materials of a fluorinated granular carbon dispersed in a polymer material and conductor pattern. The fluorocarbon content of the composite material is enough to make the dispersed content. of the composite material lower than that of the polymer material. The composite material can be made conductive by irradiating with an UV excimer laser.
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公开(公告)号：JPH0248666A
公开(公告)日：1990-02-19
申请号：JP14856189
申请日：1989-06-13
Applicant: IBM
Inventor： SUTEIIBUN RINTSU BAADO , KURAUDEIUSU FUEEGAA , JIYON JIYOSEFU GURENINGU , GARESU JIEFURII HOKAMU , SUTEIIBUN AARU MORISU , UOORUTAA POORU PAUROUSUKII , JIYON JIEIMUZU RITSUKO , PIITAA SUROUTA JIYUNIA , RANDEI UIRIAMU SUNAIDAA
IPC: G03F7/26 , C08J7/12 , G03F7/40 , H01L21/306 , H01L21/311 , H05K1/03 , H05K3/00 , H05K3/10
Abstract: PURPOSE: To unnecessitate the use of dangerous or explosive chemicals in etching a polyimide layer by bringing the layer into successive contact with an aq. soln., an acid and a soln. CONSTITUTION: A satisfactorily or practically satisfactorily cured polyimide layer is brought into successive contact with an aq. metal. hydroxide soln., an acid and a metal hydroxide soln. The transfer of chemicals from one bath to other bath by which the service life of the baths is shortened by neutralization is suppressed and slight washing can be carried out.
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