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公开(公告)号：BR112012031951A2
公开(公告)日：2018-03-06
申请号：BR112012031951
申请日：2011-06-10
Applicant: IBM
Inventor： ABHISHEK DUBE , DAE-GYU PARK , JEFFREY B JOHNSON , JINGHONG LI , JUDSON R HOLT , KEVIN K CHAN , ZHENGMAO ZHU
IPC: H01L21/336 , H01L29/78
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