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公开(公告)号：JPS529648A
公开(公告)日：1977-01-25
申请号：JP7999576
申请日：1976-07-07
Applicant: IBM
Inventor： JIYOSEFU EMU HAABIRUCHIYATSUKU , UIRIAMU SHII METSUGAA , YAKOBU RAIZUMAN , JIERARUDEIN SHII SHIYUWARUTSU
IPC: C23F4/00 , C23F1/00 , H01L21/302 , H01L21/3065
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