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公开(公告)号:JPS60147732A
公开(公告)日:1985-08-03
申请号:JP19276284
申请日:1984-09-17
Applicant: IBM
Inventor: EDOWAADO DAAKO BABITSUCHI , MAIKERU HATOZAKISU , JIYURIJI ROSUTEISURABU PARASUZ , JIEEN MAAGARETSUTO SHIYOU
IPC: G03C1/72 , G03F7/004 , G03F7/023 , G03F7/038 , G03F7/075 , H01L21/027