公开(公告)号：CA1196113A

公开(公告)日：1985-10-29

申请号：CA412981

申请日：1982-10-06

Applicant: IBM

Inventor： BOHLEN HARALD ,  KAUS GERHARD ,  GRESCHNER JOHANN ,  KEYSER JOACHIM H ,  KULCKE WERNER

IPC: H01R24/00 ,  H01L23/48 ,  H01L23/532 ,  H01R12/18 ,  H01R13/02

Abstract: CONTACT DEVICE FOR RELEASABLY CONNECTING ELECTRICAL COMPONENTS Two electrical components containing electric conductor lines are interconnected by silicon contact fingers mounted on a back part made of silicon and carrying the fingers. The fingers and back part preferably represent an integral component of an integrated circuit provided on a monocrystalline substrate which is to be connected to other electrical components Fingers and back part are preferably made in accordance with micromechanical silicon semiconductor technology.

公开(公告)号：BR8205922A

公开(公告)日：1983-09-06

申请号：BR8205922

申请日：1982-10-08

Applicant: IBM

Inventor： BOHLEN HARALD ,  KAUS GERHARD ,  GRESCHNER JOHANN ,  KEYSER JOACHIM ,  KULCKE WERNER

IPC: H01R24/00 ,  H01L23/48 ,  H01L23/532 ,  H01R12/18 ,  H01R13/02 ,  H01R43/00

公开(公告)号：DE3136887A1

公开(公告)日：1983-03-31

申请号：DE3136887

申请日：1981-09-17

Applicant: IBM DEUTSCHLAND

Inventor： BAYER THOMAS ,  KAUS GERHARD ,  KEMPF JUERGEN DIPL PHYS DR ,  SCHMID GERHARD DIPL PHYS DR

IPC: G01B11/06

Abstract: For the purpose of interferometric measurement of the thickness of a varying layer (10) made from opaque material, use is made of a reference beam (J2) which is reflected at a point of the opaque material which is protected against etching by a transparent layer (11). This reference beam is polarised in the plane of incidence, and is directed onto the transparent layer at the Brewster angle ( theta b). The measuring beam (J1) is polarised at right angles to the plane of incidence and is directed alternately onto the etched part of the opaque material and onto a point of the transparent layer, in order to determine the instantaneous thickness (tm) of the transparent layer (11), which is likewise etched. The instantaneous etched depth (ts) of the opaque material can be determined from the results of the two measuring steps.