公开(公告)号：GB2585403A

公开(公告)日：2021-01-13

申请号：GB202000333

申请日：2018-06-18

Applicant: IBM

Inventor： JOHN GREG MASSEY ,  MICHAEL GORDON ,  KENNETH RODBELL

IPC: H01J35/08

Abstract: A radiation exposure system having a beam source is provided. The system further includes a variable thickness degrader, positioned between the beam source and an object to be exposed, for providing varying degrees of degradation to a radiation beam emitted from the beam source onto the object. The system also includes a set of detectors, positioned between the variable thickness degrader and the object, for receiving and measuring only a portion of the radiation beam remaining after the degradation of the radiation beam by the variable thickness degrader.

公开(公告)号：SG99289A1

公开(公告)日：2003-10-27

申请号：SG1999004765

申请日：1999-09-22

Applicant: IBM

Inventor： VLASTA A BRUSIC ,  DANIEL CHARLES EDELSTEIN ,  PAUL M FENNEY ,  WILLIAM GUTHRIE ,  MARK JASO ,  FRANK B KAUFMAN ,  NAFTALI LUSTIG ,  PETER ROPER ,  KENNETH RODBELL ,  DAVID B THOMPSON

IPC: C09G1/02 ,  C09K13/04 ,  B24C11/00 ,  C23F3/00 ,  H01L21/321

Abstract: Copper or a copper alloy is removed by chemical-mechanical planarisation (CMP) in a slurry of an oxidizer, an oxidation inhibitor, and an additive that appreciably regulates copper complexing with the oxidation inhibitor.

公开(公告)号：GB2585403B

公开(公告)日：2022-04-13

申请号：GB202000333

申请日：2018-06-18

Applicant: IBM

Inventor： JOHN GREG MASSEY ,  MICHAEL GORDON ,  KENNETH RODBELL

IPC: G01T1/29 ,  G01T1/02 ,  G21K1/02 ,  G21K1/10

Abstract: A radiation exposure system having a beam source is provided. The system further includes a variable thickness degrader, positioned between the beam source and an object to be exposed, for providing varying degrees of degradation to a radiation beam emitted from the beam source onto the object. The system also includes a set of detectors, positioned between the variable thickness degrader and the object, for receiving and measuring only a portion of the radiation beam remaining after the degradation of the radiation beam by the variable thickness degrader.