ENERGY-RELEASING CRACK STOPPER AND ITS MANUFACTURE

    公开(公告)号:JPH1098014A

    公开(公告)日:1998-04-14

    申请号:JP22767697

    申请日:1997-08-25

    Applicant: IBM SIEMENS AG

    Abstract: PROBLEM TO BE SOLVED: To obtain a crack stopper structure, which enhances crack stopping performance by a redundant energy releasing structure. SOLUTION: A redundant pattern enables absorbing a crack propagation energy which has not been absorbed by a first ring made by metallization by a second line made by metallization and to provide a surface area larger than the diffusion of crack-propagation energy. A redundant crack stopper 10 is manufactured during metallization operation with the rest of wiring on the surface of a chip 20. Accordingly, no additional manufacturing operation is needed to form a stopper structure.

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