公开(公告)号：DE69023030T2

公开(公告)日：1996-05-30

申请号：DE69023030

申请日：1990-02-20

Applicant: IBM

Inventor： DAVIS DONALD EUGENE ,  HO CECIL TZECHOR ,  LIEBERMAN JON ERIK ,  PFEIFFER HANS ,  STURANS MARIS ANDRIS

IPC: H01L21/027 ,  H01J37/147 ,  H01J37/302 ,  H01J37/141 ,  H01J37/30

Abstract: A three-stage E-beam deflection system employs breaking the entire field to be scanned into clusters and sub-fields. The scanning provided by the first stage of deflection which scans within the entire field is rectilinear and discontinuous with the scan stopping in the center of each of the clusters where an exposure is to be made, and scanning is the same within each cluster from sub-field to sub-field. The scanning within a cluster by the second stage stops in the center of each sub-field where exposure is to be made. The third stage uses high speed electrostatic deflection to provide scanning with a vector scanning mode within the sub-field being scanned.

公开(公告)号：DE69023030D1

公开(公告)日：1995-11-23

申请号：DE69023030

申请日：1990-02-20

Applicant: IBM

Inventor： DAVIS DONALD EUGENE ,  HO CECIL TZECHOR ,  LIEBERMAN JON ERIK ,  PFEIFFER HANS ,  STURANS MARIS ANDRIS

IPC: H01L21/027 ,  H01J37/147 ,  H01J37/302 ,  H01J37/141 ,  H01J37/30

Abstract: A three-stage E-beam deflection system employs breaking the entire field to be scanned into clusters and sub-fields. The scanning provided by the first stage of deflection which scans within the entire field is rectilinear and discontinuous with the scan stopping in the center of each of the clusters where an exposure is to be made, and scanning is the same within each cluster from sub-field to sub-field. The scanning within a cluster by the second stage stops in the center of each sub-field where exposure is to be made. The third stage uses high speed electrostatic deflection to provide scanning with a vector scanning mode within the sub-field being scanned.