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公开(公告)号：DE3673219D1
公开(公告)日：1990-09-13
申请号：DE3673219
申请日：1986-03-11
Applicant: IBM
Inventor： BABICH EDWARD DARKO , HATZAKIS MICHAEL , LIUTKIS JOHN JOSEPH , PARASCZCAK JURI ROSTYSLAV , SHAW JANE MARGARET
IPC: G03C5/00 , C08F2/48 , C08F290/00 , C08F299/00 , C08F299/08 , C08K5/07 , C08L83/07 , G03F7/00 , G03F7/004 , G03F7/038 , G03F7/075 , H01L21/30
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