公开(公告)号：DE68906954T2

公开(公告)日：1993-12-23

申请号：DE68906954

申请日：1989-03-15

Applicant: IBM

Inventor： DILLER RICHARD DANIEL ,  ARNOLD ANTHONY FRANCIS ,  CHANG YING YING NMN ,  COTTS PATRICIA METZGER ,  HOFER DONALD CLIFFORD ,  KHOJASTEH MAHMOUD M ,  MACY ELWOOD HERBERT ,  SHAH PRABODH RAMNIKLAL ,  VOLKSEN WILLI NMN

IPC: C09D179/08 ,  B05D5/12 ,  C08G73/10 ,  C08L79/08

公开(公告)号：DE69320567D1

公开(公告)日：1998-10-01

申请号：DE69320567

申请日：1993-06-15

Applicant: IBM

Inventor： KNORS CHRISTOPHER JOHN ,  MOREAU WAYNE MARTIN ,  MACY ELWOOD HERBERT

IPC: C08F8/32 ,  C09B69/10 ,  C09D5/00 ,  C09D133/02 ,  C09D133/26 ,  G02B1/11 ,  G03F7/09 ,  G03F7/11 ,  H01L21/027 ,  H01L21/30

Abstract: A composition and methods for the use and manufacture thereof are provided for a polymeric dye. The composition comprises one or more aminoaromatic chromophores in conjunction with polymers having an anhydride group or the reaction products thereof. The composition is particularly useful as an underlaying antireflective coating with microlithographic photoresists for the absorbtion of near or deep ultraviolet radiation.

公开(公告)号：DE69320567T2

公开(公告)日：1999-04-22

申请号：DE69320567

申请日：1993-06-15

Applicant: IBM

Inventor： KNORS CHRISTOPHER JOHN ,  MOREAU WAYNE MARTIN ,  MACY ELWOOD HERBERT

IPC: C08F8/32 ,  C09B69/10 ,  C09D5/00 ,  C09D133/02 ,  C09D133/26 ,  G02B1/11 ,  G03F7/09 ,  G03F7/11 ,  H01L21/027 ,  H01L21/30

Abstract: A composition and methods for the use and manufacture thereof are provided for a polymeric dye. The composition comprises one or more aminoaromatic chromophores in conjunction with polymers having an anhydride group or the reaction products thereof. The composition is particularly useful as an underlaying antireflective coating with microlithographic photoresists for the absorbtion of near or deep ultraviolet radiation.

公开(公告)号：DE68906954D1

公开(公告)日：1993-07-15

申请号：DE68906954

申请日：1989-03-15

Applicant: IBM

Inventor： DILLER RICHARD DANIEL ,  ARNOLD ANTHONY FRANCIS ,  CHANG YING YING NMN ,  COTTS PATRICIA METZGER ,  HOFER DONALD CLIFFORD ,  KHOJASTEH MAHMOUD M ,  MACY ELWOOD HERBERT ,  SHAH PRABODH RAMNIKLAL ,  VOLKSEN WILLI NMN

IPC: C09D179/08 ,  B05D5/12 ,  C08G73/10 ,  C08L79/08