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    SELECTIVE ETCHING OF SILICATE AND ETCHING COMPOSITION SUITABLE FOR THE METHOD
    1.
    发明专利
    SELECTIVE ETCHING OF SILICATE AND ETCHING COMPOSITION SUITABLE FOR THE METHOD 失效

    公开(公告)号：JPH1160275A

    公开(公告)日：1999-03-02

    申请号：JP15967898

    申请日：1998-06-08

    Applicant: IBM

    Inventor： RATH DAVID L ,  JAGANNATHAN RANGARAJAN ,  MCCULLOUGH KENNETH J ,  OKORN-SCHMIDT HARALD F ,  MADDEN KAREN P ,  POPE KEITH R

    IPC: C03C15/00 ,  C09K13/08 ,  H01L21/308 ,  H01L21/311

    Abstract: PROBLEM TO BE SOLVED: To selectively etch silicate glass at a speed faster than to silicon dioxide by bringing a material containing silicate glass and silicon dioxide into contact with an etching composition containing a specific amount of fluorine-containing compound and an organic solvent selected from oxolane, etc. SOLUTION: A material containing silicate glass and silicon dioxide and being doped with desirably about 0.5-10 wt.% of at least one element preferably selected from B, As, Sb and P (e.g. a blanket silicon wafer) is brought into contact with an etching composition containing about 0.05-3 mol of a fluorine- containing compound preferably selected from hydrofluoric acid, ammonium fluoride, a fluoroborate, tetrabutylammonium tetrafluoroborate, fluoroboric acid or the like and an organic solvent selected from oxolane, sulfolane, an ester, a ketone, an aldehyde, a lactone, a hydrocarbon halide, a monohydric alcohol, an amine and an imide.

    ETCHING OF SILICON NITRIDE AND ETCHANT THEREFOR
    2.
    发明专利
    ETCHING OF SILICON NITRIDE AND ETCHANT THEREFOR 失效

    公开(公告)号：JPH11121442A

    公开(公告)日：1999-04-30

    申请号：JP22878798

    申请日：1998-08-13

    Applicant: IBM

    Inventor： RATH DAVID L ,  JAGANNATHAN RANGARAJAN ,  MCCULLOUGH KENNETH J ,  OKORN-SCHMIDT HARALD F ,  MADDEN KAREN P ,  POPE KEITH R

    IPC: H01L21/306 ,  H01L21/308 ,  H01L21/311

    Abstract: PROBLEM TO BE SOLVED: To provide a method of etching silicon nitride with an etching rate which is at least as fast as that for silicon dioxide, by contacting a target material containing silicon nitride and silicon dioxide to a composite etchant which is composed of a fluorine-containing compound of a specified molar concentration, an organic solvent, and water of a specified molar concentration. SOLUTION: Silicon nitride lies in a target material containing silicon dioxide, and a composite etchant contacts to both the silicon nitride and the silicon dioxide. The composite etchant contains a fluorine-containing compound, an organic solvent, and water. The concentration of the fluorine-containing compound shall be approximately 0.1-3 mol/dm , more preferably approximately 0.15-1.5 mol/dm , and most preferably approximately 0.2-1 mol/dm . Generally, the concentration of the water shall be approximately 0.1-4 mol/dm , more preferably approximately 0.15-2 mol/dm , and most preferably approximately 0.2-1.5 mol/dm .

    METHOD, COMPUTER PROGRAM PRODUCT, AND SYSTEM INFORMATION TRANSFER USING OPTICAL ZONE
    3.
    发明专利
    METHOD, COMPUTER PROGRAM PRODUCT, AND SYSTEM INFORMATION TRANSFER USING OPTICAL ZONE 审中-公开

    公开(公告)号：JP2002123343A

    公开(公告)日：2002-04-26

    申请号：JP2001195765

    申请日：2001-06-28

    Applicant: IBM

    Inventor： MCDEN ROBERT B ,  MADDEN KAREN P

    IPC: G06F3/00 ,  G06F3/14 ,  G06F13/00 ,  G06F15/16 ,  G06K19/06 ,  G06K19/07 ,  G09G5/00 ,  H04L29/08

    Abstract: PROBLEM TO BE SOLVED: To provide a method, a computer program product, and a system for transferring information to a portable information device by using an optical zone. SOLUTION: An area of pixels on a display monitor, i.e., the optical zone is lit up and then optical pulses are displayed. A time series of the optical pulses including a bit stream providing clocking information is displayed and the bit stream is displayed in the optical zone simultaneously with a data bit stream coded by using a standard coding system. The bit stream data are detected and downloaded by using a sensing device connected to the portable information device. When the display monitor is a color display monitor, the lightness of each primary color is usable as an individual transmission channel and data can be transmitted by using multiple optical zones, so that even a monochromatic display monitor can be used.

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