-
公开(公告)号：MY118712A
公开(公告)日：2005-01-31
申请号：MYPI9802282
申请日：1998-05-22
Applicant: IBM
Inventor： RATH DAVID L , JAGANNATHAN RANGARAJAN , MCCLLOUGH KENNETH J , OKORN-SCHMIDT HARALD F , MADDEN KAREN P , POPE KEITH R
IPC: H01L21/302 , B44C1/22 , C03C15/00 , C09K13/08 , H01L21/308 , H01L21/311
Abstract: A SILICATE GLASS IS SELECTIVELY ETCHED EMPLOYING A COMPOSITION CONTAINING A FLUORIDE CONTAINING COMPOUND AND CERTAIN ORGANIC SOLVENTS. PREFERRED COMPOSITIONS ALSO INCLUDE WATER.
Search Results
1
records
(took 0.016 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
