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公开(公告)号：AT549741T
公开(公告)日：2012-03-15
申请号：AT04723639
申请日：2004-03-26
Applicant: IBM
Inventor： ANGELL DAVID , BEAULIEU FREDERIC , HISADA TAKASHI , KELLY ADREANNE , MCKNIGHT SAMUEL , MIYAI HIROMITSU , PETRARCA KEVIN , SAUTER WOLFGANG , VOLANT RICHARD , WEINSTEIN CAITLIN
IPC: H01L21/60 , H01L23/485
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