公开(公告)号：DE69317703T2

公开(公告)日：1998-10-29

申请号：DE69317703

申请日：1993-06-21

Applicant: IBM

Inventor： BARD STEVEN LINDZ ,  JONES JEFFREY DONALD ,  KATYL ROBERT HENRY ,  MOORE RONALD JAMES ,  MORENO OSCAR AUREO

IPC: B05C5/02 ,  B05D1/36 ,  B08B3/02 ,  C23F1/08 ,  F26B21/00 ,  H01L21/304 ,  H05K3/00 ,  H05K3/22 ,  H05K3/26

Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.

公开(公告)号：SG44399A1

公开(公告)日：1997-12-19

申请号：SG1996000148

申请日：1993-06-21

Applicant: IBM

Inventor： BARD STEVEN LINDZ ,  JONES JEFFREY DONALD ,  KATYL ROBERT HENRY ,  MOORE RONALD JAMES ,  MORENO OSCAR AUREO

IPC: B05C5/02 ,  B05D1/36 ,  B08B3/02 ,  C23F1/08 ,  F26B21/00 ,  H01L21/304 ,  H05K3/00 ,  H05K3/22 ,  H05K3/26

Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.

公开(公告)号：ES2114973T3

公开(公告)日：1998-06-16

申请号：ES93109877

申请日：1993-06-21

Applicant: IBM

Inventor： BARD STEVEN LINDZ ,  JONES JEFFREY DONALD ,  KATYL ROBERT HENRY ,  MOORE RONALD JAMES ,  MORENO OSCAR AUREO

IPC: B05C5/02 ,  B05D1/36 ,  B08B3/02 ,  C23F1/08 ,  F26B21/00 ,  H01L21/304 ,  H05K3/00 ,  H05K3/22 ,  H05K3/26

Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.

公开(公告)号：DE69317703D1

公开(公告)日：1998-05-07

申请号：DE69317703

申请日：1993-06-21

Applicant: IBM

Inventor： BARD STEVEN LINDZ ,  JONES JEFFREY DONALD ,  KATYL ROBERT HENRY ,  MOORE RONALD JAMES ,  MORENO OSCAR AUREO

IPC: B05C5/02 ,  B05D1/36 ,  B08B3/02 ,  C23F1/08 ,  F26B21/00 ,  H01L21/304 ,  H05K3/00 ,  H05K3/22 ,  H05K3/26

Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.

公开(公告)号：AT164722T

公开(公告)日：1998-04-15

申请号：AT93109877

申请日：1993-06-21

Applicant: IBM

Inventor： BARD STEVEN LINDZ ,  JONES JEFFREY DONALD ,  KATYL ROBERT HENRY ,  MOORE RONALD JAMES ,  MORENO OSCAR AUREO

IPC: B05C5/02 ,  B05D1/36 ,  B08B3/02 ,  C23F1/08 ,  F26B21/00 ,  H01L21/304 ,  H05K3/00 ,  H05K3/22 ,  H05K3/26

Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.