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公开(公告)号:DE69317703T2
公开(公告)日:1998-10-29
申请号:DE69317703
申请日:1993-06-21
Applicant: IBM
Inventor: BARD STEVEN LINDZ , JONES JEFFREY DONALD , KATYL ROBERT HENRY , MOORE RONALD JAMES , MORENO OSCAR AUREO
IPC: B05C5/02 , B05D1/36 , B08B3/02 , C23F1/08 , F26B21/00 , H01L21/304 , H05K3/00 , H05K3/22 , H05K3/26
Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.
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公开(公告)号:SG44399A1
公开(公告)日:1997-12-19
申请号:SG1996000148
申请日:1993-06-21
Applicant: IBM
Inventor: BARD STEVEN LINDZ , JONES JEFFREY DONALD , KATYL ROBERT HENRY , MOORE RONALD JAMES , MORENO OSCAR AUREO
IPC: B05C5/02 , B05D1/36 , B08B3/02 , C23F1/08 , F26B21/00 , H01L21/304 , H05K3/00 , H05K3/22 , H05K3/26
Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.
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公开(公告)号:ES2114973T3
公开(公告)日:1998-06-16
申请号:ES93109877
申请日:1993-06-21
Applicant: IBM
Inventor: BARD STEVEN LINDZ , JONES JEFFREY DONALD , KATYL ROBERT HENRY , MOORE RONALD JAMES , MORENO OSCAR AUREO
IPC: B05C5/02 , B05D1/36 , B08B3/02 , C23F1/08 , F26B21/00 , H01L21/304 , H05K3/00 , H05K3/22 , H05K3/26
Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.
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公开(公告)号:DE69317703D1
公开(公告)日:1998-05-07
申请号:DE69317703
申请日:1993-06-21
Applicant: IBM
Inventor: BARD STEVEN LINDZ , JONES JEFFREY DONALD , KATYL ROBERT HENRY , MOORE RONALD JAMES , MORENO OSCAR AUREO
IPC: B05C5/02 , B05D1/36 , B08B3/02 , C23F1/08 , F26B21/00 , H01L21/304 , H05K3/00 , H05K3/22 , H05K3/26
Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.
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公开(公告)号:AT164722T
公开(公告)日:1998-04-15
申请号:AT93109877
申请日:1993-06-21
Applicant: IBM
Inventor: BARD STEVEN LINDZ , JONES JEFFREY DONALD , KATYL ROBERT HENRY , MOORE RONALD JAMES , MORENO OSCAR AUREO
IPC: B05C5/02 , B05D1/36 , B08B3/02 , C23F1/08 , F26B21/00 , H01L21/304 , H05K3/00 , H05K3/22 , H05K3/26
Abstract: A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.
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公开(公告)号:MY116476A
公开(公告)日:2004-02-28
申请号:MYPI9400747
申请日:1994-03-28
Applicant: IBM
Inventor: BARD STEVEN LINDZ , MCCREARY JACK MARLYN , BENDZ GERALD ANDREI , CANESTARO MICHAEL JAMES , CHAPURA JOHN ROBERT , FRANKOSKI EDWARD JAY , HORAN MICHAEL SHAWN , JONES JEFFREY DONALD , KAMPERMAN JAMES STEVEN , KJELGAARD JOHN ROBERT JR
Abstract: A FLUID TREATMENT APPARATUS AND METHOD FOR APPLYING FIRST AND SECOND FLUIDS (E.G., ETCHANT AND WATER) TO AN ARTICLE (E.G., CIRCUIT BOARD) PASSING THROUGH THE APPARATUS AT A PREDETERMINED RATE. THE FIRST FLUID IS IMPINGED ON A SURFACE OF THE ARTICLE AND THEREAFTER COLLECTED WITHIN THE APPARATUS' COMMON HOUSING. THE SECOND FLUID IS IMPINGED ONTO THE SURFACE OF THE ARTICLE AND COLLECTED WITHIN THE SAME HOUSING BUT AT A LOCATION SEPARATE FROM THE COLLECTED FIRST FLUID SO AS TO AT LEAST PARTIALLY PREVENT MIXING THEREOF. THE PREFERRED MEANS FOR EFFECTING FLUID IMPINGEMENT COMPRISES SEPARATE FLUID INJECTORS, EACH INCLUDING AT LEAST TWO ROWS OF FLUID JET INJECTORS THEREIN. THE COLLECTED FLUIDS ARE EACH RETURNED TO THE RESPECTIVE IMPINGEMENT MEANS. REPLENISHMENT OF THE SECOND FLUID IS ACCOMPLISHED USING A PUMP WHICH SUPPLIES THE SECOND FLUID, WHILE THE APPARATUS ALSO INCLUDES MEANS (E. G. , A DRAIN) TO EFFECTIVELY REMOVE THE SECOND FLUID AT A RATE SIMILAR TO THE SUPPLY RATE FOR THE SECOND FLUID. THE FIRST FLUID IS ALSO MAINTAINED AT AN ESTABLISHED LEVEL ABOVE THE ARTICLE'S SURFACE USING SUITABLE MEANS (E.G., DUAL ROLLERS) LOCATED RELATIVE (E.G., ON OPPOSITE SIDES OF) THE FIRST FLUID IMPINGEMENT MEANS. SIMILAR LEVEL RETENTION FOR THE SECOND FLUID IS ALSO POSSIBLE. CASCADING OF THE COLLECTED SECOND FLUID IS ALSO DEFINED, THIS OCCURING WITHIN THE SAME HOUSING CHAMBER WHICH SERVES TO COLLECT THE FIRST FLUID.( FIG 1 )
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公开(公告)号:DE69408490T2
公开(公告)日:1998-09-24
申请号:DE69408490
申请日:1994-03-30
Applicant: IBM
Inventor: BARD STEVEN LINDZ , BENDZ GERALD ANDREI , CANESTARO MICHAEL JAMES , CHAPURA JOHN ROBERT , FRANKOSKI EDWARD JAY , HORAN MICHAEL SHAWN , JONES JEFFREY DONALD , KAMPERMAN JAMES STEVEN , KJELGAARD JOHN ROBERT , MCCREARY JACK MARLYN
Abstract: A fluid treatment apparatus and method for applying first and second fluids (e.g., etchant and water) to an article (e.g., circuit board) passing through the apparatus at a predetermined rate. The first fluid is impinged on a surface of the article (11) and thereafter collected within the apparatus' common housing (13). The second fluid is impinged onto the surface of the article and collected within the same housing but at a location separate from the collected first fluid so as to at least partially prevent mixing thereof. The preferred means for effecting fluid impingement comprises separate fluid injectors, each including at least two rows of fluid jet injectors (27) therein. The collected fluids are each returned to the respective impingement means (23, 41). Replenishment of the second fluid is accomplished using a pump which supplies the second fluid, while the apparatus also includes means (e.g., a drain) to effectively remove the second fluid at a rate similar to the supply rate for the second fluid. The first fluid is also maintained at an established level above the article's surface using suitable means (e.g., dual rollers) located relative (e.g., on opposite sides of) the first fluid impingement means. Similar level retention for the second fluid is also possible. Cascading of the collected second fluid is also defined, this occuring within the same housing chamber which serves to collect the first fluid.
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公开(公告)号:DE69408490D1
公开(公告)日:1998-03-19
申请号:DE69408490
申请日:1994-03-30
Applicant: IBM
Inventor: BARD STEVEN LINDZ , BENDZ GERALD ANDREI , CANESTARO MICHAEL JAMES , CHAPURA JOHN ROBERT , FRANKOSKI EDWARD JAY , HORAN MICHAEL SHAWN , JONES JEFFREY DONALD , KAMPERMAN JAMES STEVEN , KJELGAARD JOHN ROBERT , MCCREARY JACK MARLYN
Abstract: A fluid treatment apparatus and method for applying first and second fluids (e.g., etchant and water) to an article (e.g., circuit board) passing through the apparatus at a predetermined rate. The first fluid is impinged on a surface of the article (11) and thereafter collected within the apparatus' common housing (13). The second fluid is impinged onto the surface of the article and collected within the same housing but at a location separate from the collected first fluid so as to at least partially prevent mixing thereof. The preferred means for effecting fluid impingement comprises separate fluid injectors, each including at least two rows of fluid jet injectors (27) therein. The collected fluids are each returned to the respective impingement means (23, 41). Replenishment of the second fluid is accomplished using a pump which supplies the second fluid, while the apparatus also includes means (e.g., a drain) to effectively remove the second fluid at a rate similar to the supply rate for the second fluid. The first fluid is also maintained at an established level above the article's surface using suitable means (e.g., dual rollers) located relative (e.g., on opposite sides of) the first fluid impingement means. Similar level retention for the second fluid is also possible. Cascading of the collected second fluid is also defined, this occuring within the same housing chamber which serves to collect the first fluid.
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