公开(公告)号：DE68915354D1

公开(公告)日：1994-06-23

申请号：DE68915354

申请日：1989-06-08

Applicant: IBM

Inventor： HERRON LESTER WYNN ,  KNICKERBOCKER SARAH HUFFSMITH ,  KUMAR ANANDA HOSAKERE ,  NMN NATARAJAN GOVINDARAJAN ,  REDDY SRINIVASA S N

IPC: C04B35/64 ,  B32B18/00 ,  C04B35/634 ,  C04B35/638 ,  H01L21/48 ,  H05K3/46 ,  C04B35/00

Abstract: There is disclosed the enhancement of the removal of carbon from multilayer ceramic substrate laminate during the sintering thereof. A multilayer ceramic substrate laminate having metallic lines and vias is provided with a reducible metal oxide in close proximity to the substrate laminate. The multilayer ceramic substrate laminate contains a polymeric binder which upon heating depolymerizes into carbon. The substrate laminate is sintered in an atmosphere which is reducing with respect to the reducible metal oxide and which is oxidizing with respect to the carbon.

公开(公告)号：DE68915354T2

公开(公告)日：1994-11-24

申请号：DE68915354

申请日：1989-06-08

Applicant: IBM

Inventor： HERRON LESTER WYNN ,  KNICKERBOCKER SARAH HUFFSMITH ,  KUMAR ANANDA HOSAKERE ,  NMN NATARAJAN GOVINDARAJAN ,  REDDY SRINIVASA S N

IPC: C04B35/64 ,  B32B18/00 ,  C04B35/634 ,  C04B35/638 ,  H01L21/48 ,  H05K3/46 ,  C04B35/00

Abstract: There is disclosed the enhancement of the removal of carbon from multilayer ceramic substrate laminate during the sintering thereof. A multilayer ceramic substrate laminate having metallic lines and vias is provided with a reducible metal oxide in close proximity to the substrate laminate. The multilayer ceramic substrate laminate contains a polymeric binder which upon heating depolymerizes into carbon. The substrate laminate is sintered in an atmosphere which is reducing with respect to the reducible metal oxide and which is oxidizing with respect to the carbon.