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公开(公告)号:DE69204340T2
公开(公告)日:1996-03-21
申请号:DE69204340
申请日:1992-03-13
Applicant: IBM
Inventor: DIPAOLO NUNZIO , KUMAR ANANDA HOSAKERE , WIGGINS LOVELL BERRY
IPC: C03C17/06 , C03C27/04 , C04B37/02 , H01B1/02 , H01L21/48 , H01L23/498 , H05K1/09 , H05K3/46 , H01B1/22
Abstract: Disclosed is a method for promoting adhesion of cofired copper-based metallurgy and glass-ceramic dielectric including the step of adding powders of an alloying metal to the copper-based metallurgy prior to firing. Also disclosed is a metallizing paste exhibiting superior adhesion to glass-ceramics. The paste includes an organic carrier, copper powder and an alloying metal, which may be a non-copper metal powder or a copper-metal alloy. It is preferred that of the metal in the paste, the copper should make up 80-99 weight percent and the alloying metal should make up 1-20 weight percent.
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公开(公告)号:BR8504923A
公开(公告)日:1986-07-22
申请号:BR8504923
申请日:1985-10-07
Applicant: IBM
Inventor: HERRON LESTER WYNN , KUMAR ANANDA HOSAKERE
Abstract: In a maskless metal cladding process for plating an existing metallurgical pattern (13), a protective layer (16) is utilized to isolate those areas of underlying metallurgy on which additional metal plating is not desired. The layer acts as an isolation barrier to protect the underlying metallurgy from deposition and subsequent diffusion of the heavy metal overlay (17). The composition of the protective layer is selected as one having sufficient mechanical integrity to withstand process handling and support the gold overlay and having the thermal integrity to withstand the high temperatures reached during metal sputtering and diffusion processes. The isolation barrier layer has an organic component as a binder which thermally decomposes, either in a heating step before metal deposition or during the diffusion cycle, leaving no carbonaceous residue but leaving an inert, inorganic standoff to support the metal. After diffusion of the metal, the remaining inorganic standoff layer, overlying metal and any undiffused metal remaining on the non-patterned substrate is easily removed by a standard technique, such as ultrasonics.
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公开(公告)号:DE69204340D1
公开(公告)日:1995-10-05
申请号:DE69204340
申请日:1992-03-13
Applicant: IBM
Inventor: DIPAOLO NUNZIO , KUMAR ANANDA HOSAKERE , WIGGINS LOVELL BERRY
IPC: C03C17/06 , C03C27/04 , C04B37/02 , H01B1/02 , H01L21/48 , H01L23/498 , H05K1/09 , H05K3/46 , H01B1/22
Abstract: Disclosed is a method for promoting adhesion of cofired copper-based metallurgy and glass-ceramic dielectric including the step of adding powders of an alloying metal to the copper-based metallurgy prior to firing. Also disclosed is a metallizing paste exhibiting superior adhesion to glass-ceramics. The paste includes an organic carrier, copper powder and an alloying metal, which may be a non-copper metal powder or a copper-metal alloy. It is preferred that of the metal in the paste, the copper should make up 80-99 weight percent and the alloying metal should make up 1-20 weight percent.
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公开(公告)号:AU569805B2
公开(公告)日:1988-02-18
申请号:AU4791285
申请日:1985-09-26
Applicant: IBM
Inventor: HERRON LESTER WYNN , KUMAR ANANDA HOSAKERE , NUFER ROBERT WOLFF
Abstract: In a maskless metal cladding process for plating an existing metallurgical pattern (13), a protective layer (16) is utilized to isolate those areas of underlying metallurgy on which additional metal plating is not desired. The layer acts as an isolation barrier to protect the underlying metallurgy from deposition and subsequent diffusion of the heavy metal overlay (17). The composition of the protective layer is selected as one having sufficient mechanical integrity to withstand process handling and support the gold overlay and having the thermal integrity to withstand the high temperatures reached during metal sputtering and diffusion processes. The isolation barrier layer has an organic component as a binder which thermally decomposes, either in a heating step before metal deposition or during the diffusion cycle, leaving no carbonaceous residue but leaving an inert, inorganic standoff to support the metal. After diffusion of the metal, the remaining inorganic standoff layer, overlying metal and any undiffused metal remaining on the non-patterned substrate is easily removed by a standard technique, such as ultrasonics.
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公开(公告)号:DE3368447D1
公开(公告)日:1987-01-29
申请号:DE3368447
申请日:1983-03-15
Applicant: IBM
Inventor: KUMAR ANANDA HOSAKERE , SRIKRISHNAN KRIS VENKATRAMAN
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公开(公告)号:DE68915354T2
公开(公告)日:1994-11-24
申请号:DE68915354
申请日:1989-06-08
Applicant: IBM
Inventor: HERRON LESTER WYNN , KNICKERBOCKER SARAH HUFFSMITH , KUMAR ANANDA HOSAKERE , NMN NATARAJAN GOVINDARAJAN , REDDY SRINIVASA S N
IPC: C04B35/64 , B32B18/00 , C04B35/634 , C04B35/638 , H01L21/48 , H05K3/46 , C04B35/00
Abstract: There is disclosed the enhancement of the removal of carbon from multilayer ceramic substrate laminate during the sintering thereof. A multilayer ceramic substrate laminate having metallic lines and vias is provided with a reducible metal oxide in close proximity to the substrate laminate. The multilayer ceramic substrate laminate contains a polymeric binder which upon heating depolymerizes into carbon. The substrate laminate is sintered in an atmosphere which is reducing with respect to the reducible metal oxide and which is oxidizing with respect to the carbon.
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公开(公告)号:AU4791285A
公开(公告)日:1986-05-08
申请号:AU4791285
申请日:1985-09-26
Applicant: IBM
Inventor: HERRON LESTER WYNN , KUMAR ANANDA HOSAKERE , NUFER ROBERT WOLFF
Abstract: In a maskless metal cladding process for plating an existing metallurgical pattern (13), a protective layer (16) is utilized to isolate those areas of underlying metallurgy on which additional metal plating is not desired. The layer acts as an isolation barrier to protect the underlying metallurgy from deposition and subsequent diffusion of the heavy metal overlay (17). The composition of the protective layer is selected as one having sufficient mechanical integrity to withstand process handling and support the gold overlay and having the thermal integrity to withstand the high temperatures reached during metal sputtering and diffusion processes. The isolation barrier layer has an organic component as a binder which thermally decomposes, either in a heating step before metal deposition or during the diffusion cycle, leaving no carbonaceous residue but leaving an inert, inorganic standoff to support the metal. After diffusion of the metal, the remaining inorganic standoff layer, overlying metal and any undiffused metal remaining on the non-patterned substrate is easily removed by a standard technique, such as ultrasonics.
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公开(公告)号:DK495885A
公开(公告)日:1986-05-01
申请号:DK495885
申请日:1985-10-29
Applicant: IBM
Inventor: HERRON LESTER WYNN , KUMAR ANANDA HOSAKERE
Abstract: In a maskless metal cladding process for plating an existing metallurgical pattern (13), a protective layer (16) is utilized to isolate those areas of underlying metallurgy on which additional metal plating is not desired. The layer acts as an isolation barrier to protect the underlying metallurgy from deposition and subsequent diffusion of the heavy metal overlay (17). The composition of the protective layer is selected as one having sufficient mechanical integrity to withstand process handling and support the gold overlay and having the thermal integrity to withstand the high temperatures reached during metal sputtering and diffusion processes. The isolation barrier layer has an organic component as a binder which thermally decomposes, either in a heating step before metal deposition or during the diffusion cycle, leaving no carbonaceous residue but leaving an inert, inorganic standoff to support the metal. After diffusion of the metal, the remaining inorganic standoff layer, overlying metal and any undiffused metal remaining on the non-patterned substrate is easily removed by a standard technique, such as ultrasonics.
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公开(公告)号:CH645602A5
公开(公告)日:1984-10-15
申请号:CH38779
申请日:1979-01-16
Applicant: IBM
Inventor: KUMAR ANANDA HOSAKERE , MCMILLAN PETER , TUMMALA RAO RAMAMOHANA
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公开(公告)号:DE68915354D1
公开(公告)日:1994-06-23
申请号:DE68915354
申请日:1989-06-08
Applicant: IBM
Inventor: HERRON LESTER WYNN , KNICKERBOCKER SARAH HUFFSMITH , KUMAR ANANDA HOSAKERE , NMN NATARAJAN GOVINDARAJAN , REDDY SRINIVASA S N
IPC: C04B35/64 , B32B18/00 , C04B35/634 , C04B35/638 , H01L21/48 , H05K3/46 , C04B35/00
Abstract: There is disclosed the enhancement of the removal of carbon from multilayer ceramic substrate laminate during the sintering thereof. A multilayer ceramic substrate laminate having metallic lines and vias is provided with a reducible metal oxide in close proximity to the substrate laminate. The multilayer ceramic substrate laminate contains a polymeric binder which upon heating depolymerizes into carbon. The substrate laminate is sintered in an atmosphere which is reducing with respect to the reducible metal oxide and which is oxidizing with respect to the carbon.
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