公开(公告)号：JP2001215514A

公开(公告)日：2001-08-10

申请号：JP2000026263

申请日：2000-02-03

Applicant: IBM

Inventor： NAKASOGI AKIHIRO ,  NOGAMI TETSUYA ,  MURAYAMA KOJI

IPC: G02F1/1337 ,  G02F1/137 ,  G02F1/139

Abstract: PROBLEM TO BE SOLVED: To provide a liquid crystal device having uniform perpendicular alignment a method and a device for the production of that liquid crystal device, with respect to the production of an electrically controlled birefringence effect (ECB) type perpendicular alignment liquid crystal device. SOLUTION: The liquid crystal device contains liquid crystal molecules 12 having negative dielectric anisotropy and a polyimide 18 for parallel alignment. The method of producing the device includes a process exposing one surface or the both surfaces of a substrate 14 of the liquid crystal device, having the liquid crystal molecules having a negative dielectric anisotropy aligned parallel by the alignment polyimide and to align the liquid crystal molecules in the perpendicular direction. The exposure device used for the exposure is equipped with a filter, so as to cut the light having =600 nm wavelength, to use the light having the wavelength of 400 nm to 600 nm. When a voltage is applied between electrodes 16 of the liquid crystal device, a response time becomes faster.

公开(公告)号：JP2001174409A

公开(公告)日：2001-06-29

申请号：JP35545599

申请日：1999-12-15

Applicant: IBM

Inventor： UDA MITSURU ,  NOGAMI TETSUYA ,  IGUCHI TAKESHI

IPC: H01L21/027 ,  G01N21/84 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide a lighting apparatus for inspection capable of visually and clearly detecting whether or not a defect such as defocussing inferiority or the like is present on a fine surface to be processed of the resist pattern or the like formed on a semiconductor substrate such as a wafer or the like and especially enhanced in visibility by widening the angle of visibility. SOLUTION: The two-wavelength tube having peak wavelengths of respective colors in a complementary color relation and capable of emitting two kinds of coherent lights narrow in wavelength region is provided. The two-wavelength tube is especially constituted of a fluorescent tube coated with a plurality of phosphors capable of emitting two kinds of coherent lights or a discharge tube filled with gas capable of emitting two kinds of coherent lights. A surface 16 to be processed of a predetermined pattern formed on a substrate 18 is irradiated with the coherent lights 14 from the light source of the lighting apparatus 12 for inspection and, on the basis of the diffracted light 22 from the fine surface 16 to be processed, it is judged whether or not the fine surface 16 to be processed is deformed from the predetermined pattern. The lighting apparatus 12 is constituted so that the irradiating coherent lights 14 have peak wavelengths of respective colors in complementary color relation and have a narrow wavelength region.

公开(公告)号：JPH09211424A

公开(公告)日：1997-08-15

申请号：JP1913896

申请日：1996-02-05

Applicant: IBM

Inventor： TOUOKA TAKATOSHI ,  NOGAMI TETSUYA

IPC: G02F1/133 ,  G09G3/20 ,  G09G3/36

Abstract: PROBLEM TO BE SOLVED: To provide a pixel provided with a voltage amplifying function in the picture element to AC-drive a LCD cell at sufficiently potential with a low dielectric withstanding driver while keeping an opposing electrode potential constant. SOLUTION: Plural gate lines 3 running in a first direction, plural source lines 4 running in a second direction different from the first direction, a switching means 2 to be switched on-off by the voltage applied to the first gate lines 3 to supply the voltage of the source line 4, a pixel capacitance 1 (constant) connected with the source line 4 via this switching means 2, and a variable capacitance 7 connected with the source line 4 via the switching means 2 in parallel with this constant capacitance, are provided. The variable capacitance 7 is connected with the second gate line 3 independent of the first gate line 3 and its capacitance varies depending on an added voltage.