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    Article-handling apparatus
    1.
    发明授权
    Article-handling apparatus 失效

    公开(公告)号：US3625384A

    公开(公告)日：1971-12-07

    申请号：US3625384D

    申请日：1968-09-26

    Applicant: IBM

    Inventor： BOERGER FRANK E ,  NUCCIO CARLO ,  ROSBOSCHIL CHARLES A

    IPC: B65G59/06 ,  H01L21/677 ,  H01L21/683 ,  B65G59/00

    CPC classification number: H01L21/6835 ,  B65G59/062

    Abstract: Articles are transported from one position to another by being disposed in trays, which are carried within a portable magazine. The trays are automatically unloaded in sequence from the magazine and transported to a position in which the articles in the tray may be removed therefrom. The unloaded tray is then returned to the magazine and the next of the trays is removed from the magazine. The apparatus includes coding means on the magazine to indicate the status of the articles within each of the trays in the magazine.

    Elongated electrode and target arrangement for an re sputtering apparatus and method of sputtering
    2.
    发明授权
    Elongated electrode and target arrangement for an re sputtering apparatus and method of sputtering 失效
    用于重新喷溅装置的伸长电极和目标装置和溅射方法

    公开(公告)号：US3707452A

    公开(公告)日：1972-12-26

    申请号：US3707452D

    申请日：1970-01-22

    Applicant: IBM

    Inventor： LESTER WILLIAM CARL ,  NUCCIO CARLO ,  WARD ERNEST S

    IPC: H05B7/00 ,  B65H18/02 ,  C23C14/34 ,  C23C14/40 ,  H01J37/34 ,  C23C15/00

    CPC classification number: B65H18/021 ,  C23C14/3478 ,  H01J37/34

    Abstract: AN RF SPUTTERING APPARATUS HAS AN ELONGATED HOLLOW CYLINDRICAL TARGET SURROUNDING AN ELONGATED CYLINDRICAL CATHODE TO SHIELD THE CATHODE FROM A PARTIALLY EVACUATED CHAMBER IN WHICH THE TARGET IS DISPOSED. AN ELONGATED HOLLOW CYLINDRICAL ANODE IS DISPOSED IN SURROUNDING RELATION TO THE TARGET. THE TARGET IS SPACED FROM THE CATHODE SO THAT COOLING OF THE TARGET MAY OCCUR BY DIELECTRIC COOLANT FLOWING THEREBETWEEN WITH THE DIELECTRIC COOLANT ALSO TRANSFERRING RF POWER TO THE TARGET FROM THE CATHODE WHEN RF POWER IS APPLIED BETWEEN THE CATHODE AND THE ANODE. IN AN EXTENSION TO CONTINUOUS MODE DEPOSITION (AS OPPOSED TO BATCH MODE DEPOSITION), SUBSTRATES CAN HAVE VARYING THICKNESSES OF MATERIAL DEPOSITED THEREON FROM THE TARGET UNDER THE SAME SPUTTERING CONDITIONS BY MOVING EACH SUBSTRATE INTO THE CHAMBER FOR SUPPORT ON THE INNER SURFACE OF THE ANODE, ROTATING THE ANODE ABOUT THE TARGET AT A CONSTANT VELOCITY, AND THEN REMOVING EACH SUBSTRATE AFTER A PERIOD OF TIME. THE AMOUNT OF TIME THAT EACH OF THE SUBSTRATES IS SUPPORTED ON THE ANODE DETERMINES THE THICKNESS OF THE DEPOSITED MATERIAL ON THE SUBSTRATE.

    Continuous vacuum process apparatus
    5.
    发明授权
    Continuous vacuum process apparatus 失效
    连续真空过程设备

    公开(公告)号：US3652444A

    公开(公告)日：1972-03-28

    申请号：US3652444D

    申请日：1969-10-24

    Applicant: IBM

    Inventor： LESTER WILLIAM C ,  NUCCIO CARLO ,  WARD ERNEST S

    IPC: B23Q3/08 ,  B01J3/00 ,  B01J3/02 ,  C23C14/56 ,  H01L21/677 ,  C23C15/00

    CPC classification number: B01J3/006 ,  C23C14/568 ,  Y10S414/139

    Abstract: The invention is directed to a continuous vacuum multiprocessing system for treating, evaporation, or sputter vacuum depositing on a substrate or wafer for the preparation of semiconductors. The utilized structure comprises an annular chamber partitioned into alternating process and isolation compartments which are circularly arranged around a common (central) vacuum manifold. A circular transport ring, confined to the evacuated annular mechanically transports (via rotation) the substrates through the various serially connected compartments.

    Abstract translation: 本发明涉及用于处理，蒸发或溅射真空沉积在用于制备半导体的衬底或晶片上的真空多处理系统。 所使用的结构包括分隔成交替的过​​程和隔离隔室的环形室，其围绕公共（中心）真空歧管圆形布置。 限制在抽空环形中的圆形运输环通过各种串联连接的隔室机械地运输（通过旋转）基板。

    6.
    发明专利
    未知

    公开(公告)号：DE1948425A1

    公开(公告)日：1970-04-02

    申请号：DE1948425

    申请日：1969-09-25

    Applicant: IBM

    Inventor： EDWARD BOERGER FRANK ,  NUCCIO CARLO ,  ALBERT ROSBOSCHIL CHARLES

    IPC: B65G59/06 ,  H01L21/677 ,  H01L21/683 ,  B65G47/00

    Abstract: 1,265,345. Apparatus for handling individual articles in a stack. INTERNATIONAL BUSINESS MACHINES CORP. 24 Sept., 1969 [26 Sept., 1968], No. 47039/69. Heading B8C. An apparatus for handling articles, such as wafers 14 on which an integrated circuit is to be formed, comprises a magazine 10 having a number of article containers 11 supported therein in vertically stacked relation, an elevator 30 for indexing the stack in a vertical direction to bring the containers in turn to a predetermined removal position and automatic push-pull transport means 58, 59 which is movable in a horizontal direction for individually removing from, and returning to, the stack any selected container in the removal position. When locking means 20, on each sliding door 18, 19 forming opposite sides of the magazine 10, are released the doors remain stationary as the magazine 10 is moved downward on the elevator 30 which is indexed downwardly by a feed screw 36 driven by a stepping motor 37, the sides of the magazine being opened to expose the opposite sides of those containers 11 which descend below the removal position. The trays 11 are held in the magazine by a screw-down plate 26, each tray 11, Fig. 2, having pockets 12 to receive articles 14, openings 73 within the pockets 12, and two openings 48 each with a slot 49 to accommodate rods 31, 32 for guiding the elevator 30 and members which connect the upper ends of the rods 31, 32 to a support table 33. The base 17 of the elevator 30 has corresponding sets of openings 46, 47 which are closed to exclude dust &c. by cylindrical-shaped parts 50, carried by the doors 18, 19, when the latter are closed. The doors 18, 19 carry side tongs 39, Fig. 17, which locate the magazine 10 in a retention frame 29, the magazine being properly positioned when a notch in one of the tongs 39 co-operates with a pin 40 1 across one of the slots. Horizontal plates 41, which are carried by the doors 18, 19 across the tops of the tongs 39, rest upon the upper edge of the frame 29 and each carry four screws 43 which co-operate with the arms 44 of microswitches 45 the positions of which form a code to select which trays 11 are to be removed from the magazine. When a selected tray is to be removed the remainder of the trays above that selected are held by a pair of retainer arms 52, 53 which are urged inwardly, against springs, by solenoids (56, 57), Fig. 5 (not shown), to engage the bevelled edges 57 1 of the tray above the one selected, arms (70), Fig. 7 (not shown), actuating microswitches (68) and causing the descent of the elevator to stop after a predetermined number of lowering steps to provide a clearance between the selected tray and the one above it. The rounded end 59 of an arm 58, which is engaged in one of the openings 48 of the selected tray 11, is then moved forward by a carrier (60), Figs. 3, 4 (not shown), which is urged along a frame (61) by a fluid cylinder (63) to deposit the tray above an article lifter 71, Fig. 9, which has been properly orientated by a push-pull mechanism (72 1 ) Fig. 10, not shown. Four pistons 72, with suction openings 83, are raised by a fluid motor 76 to project through the openings 73 and lift the wafers 14 from the tray and hold them while each one is engaged by a corresponding group of fingers 86 at the ends of braces 92 which are urged inwardly by a cam plate 94 as a glide housing 95 of an article handler 87 which supports the sets of braces 92, is moved downwardly under the control of a fluid motor 97, the suction to the piston openings 83 then being cut off as the pistons descend in the frame of the lifter 71. Fluid is then supplied to the cylinder (63) to cause retraction of the arm 58 which pulls the tray back into the magazine 10, the retaining arms 52, 53 then being retracted ready for the removal of another selected tray 11. The sequence of operations is repeated after the articles 14 have been dropped from the article handler 87 on to a carrier (115) which is advanced by a push-pull mechanism (118), Fig. 10 (not shown), to a position beneath the handler 87 as the lifter 71 is moved away from that position by the push-pull mechanism (115). A blow-off tube 117 distributes nitrogen against the articles as they are dropped on to the carrier 115 when the fingers 86 open and the handler 87 is raised to its original position, the carrier 115 then being carried by a conveyer (119) to transport the articles to a processing station.

    7.
    发明专利
    未知

    公开(公告)号：DE2451211A1

    公开(公告)日：1975-06-26

    申请号：DE2451211

    申请日：1974-10-29

    Applicant: IBM

    Inventor： BENNETT MARVIN ,  NUCCIO CARLO ,  WURMS CHARLES

    IPC: H05K1/14 ,  H01L21/768 ,  H01L23/13 ,  H01L23/52 ,  H01L23/522 ,  H01L23/538 ,  H01L25/00 ,  H05K1/00 ,  H05K1/05 ,  H05K7/20 ,  H05K3/36

    Abstract: A package for interconnecting a plurality of integrated circuit chips including a dielectric body having a plurality of intersecting planes and a plurality of metallized interconnection patterns located thereon. Conductive interconnecting lines connected to at least some of said metallized patterns located on different intersecting planes provide inter-plane electrical continuity, and input/output connectors connect to at least one of the metallized patterns for connecting to the outside world.

    SEMICONDUCTOR WAFER SET FEEDING SYSTEM
    8.
    发明专利
    SEMICONDUCTOR WAFER SET FEEDING SYSTEM 未知

    公开(公告)号：CA951341A

    公开(公告)日：1974-07-16

    申请号：CA60846

    申请日：1969-09-02

    Applicant: IBM

    Inventor： BOERGER FRANK E ,  NUCCIO CARLO ,  ROSBOSCHIL CHARLES A

    IPC: B65G59/06 ,  H01L21/677 ,  H01L21/683

    Abstract: 1,265,345. Apparatus for handling individual articles in a stack. INTERNATIONAL BUSINESS MACHINES CORP. 24 Sept., 1969 [26 Sept., 1968], No. 47039/69. Heading B8C. An apparatus for handling articles, such as wafers 14 on which an integrated circuit is to be formed, comprises a magazine 10 having a number of article containers 11 supported therein in vertically stacked relation, an elevator 30 for indexing the stack in a vertical direction to bring the containers in turn to a predetermined removal position and automatic push-pull transport means 58, 59 which is movable in a horizontal direction for individually removing from, and returning to, the stack any selected container in the removal position. When locking means 20, on each sliding door 18, 19 forming opposite sides of the magazine 10, are released the doors remain stationary as the magazine 10 is moved downward on the elevator 30 which is indexed downwardly by a feed screw 36 driven by a stepping motor 37, the sides of the magazine being opened to expose the opposite sides of those containers 11 which descend below the removal position. The trays 11 are held in the magazine by a screw-down plate 26, each tray 11, Fig. 2, having pockets 12 to receive articles 14, openings 73 within the pockets 12, and two openings 48 each with a slot 49 to accommodate rods 31, 32 for guiding the elevator 30 and members which connect the upper ends of the rods 31, 32 to a support table 33. The base 17 of the elevator 30 has corresponding sets of openings 46, 47 which are closed to exclude dust &c. by cylindrical-shaped parts 50, carried by the doors 18, 19, when the latter are closed. The doors 18, 19 carry side tongs 39, Fig. 17, which locate the magazine 10 in a retention frame 29, the magazine being properly positioned when a notch in one of the tongs 39 co-operates with a pin 40 1 across one of the slots. Horizontal plates 41, which are carried by the doors 18, 19 across the tops of the tongs 39, rest upon the upper edge of the frame 29 and each carry four screws 43 which co-operate with the arms 44 of microswitches 45 the positions of which form a code to select which trays 11 are to be removed from the magazine. When a selected tray is to be removed the remainder of the trays above that selected are held by a pair of retainer arms 52, 53 which are urged inwardly, against springs, by solenoids (56, 57), Fig. 5 (not shown), to engage the bevelled edges 57 1 of the tray above the one selected, arms (70), Fig. 7 (not shown), actuating microswitches (68) and causing the descent of the elevator to stop after a predetermined number of lowering steps to provide a clearance between the selected tray and the one above it. The rounded end 59 of an arm 58, which is engaged in one of the openings 48 of the selected tray 11, is then moved forward by a carrier (60), Figs. 3, 4 (not shown), which is urged along a frame (61) by a fluid cylinder (63) to deposit the tray above an article lifter 71, Fig. 9, which has been properly orientated by a push-pull mechanism (72 1 ) Fig. 10, not shown. Four pistons 72, with suction openings 83, are raised by a fluid motor 76 to project through the openings 73 and lift the wafers 14 from the tray and hold them while each one is engaged by a corresponding group of fingers 86 at the ends of braces 92 which are urged inwardly by a cam plate 94 as a glide housing 95 of an article handler 87 which supports the sets of braces 92, is moved downwardly under the control of a fluid motor 97, the suction to the piston openings 83 then being cut off as the pistons descend in the frame of the lifter 71. Fluid is then supplied to the cylinder (63) to cause retraction of the arm 58 which pulls the tray back into the magazine 10, the retaining arms 52, 53 then being retracted ready for the removal of another selected tray 11. The sequence of operations is repeated after the articles 14 have been dropped from the article handler 87 on to a carrier (115) which is advanced by a push-pull mechanism (118), Fig. 10 (not shown), to a position beneath the handler 87 as the lifter 71 is moved away from that position by the push-pull mechanism (115). A blow-off tube 117 distributes nitrogen against the articles as they are dropped on to the carrier 115 when the fingers 86 open and the handler 87 is raised to its original position, the carrier 115 then being carried by a conveyer (119) to transport the articles to a processing station.

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