公开(公告)号：DE3573193D1

公开(公告)日：1989-10-26

申请号：DE3573193

申请日：1985-06-14

Applicant: IBM

Inventor： OSTERGREN CARL DAVID ,  PAIVANAS JOHN ANGELO

IPC: H01L23/36 ,  H01L23/40 ,  H01L23/433

公开(公告)号：DE3174452D1

公开(公告)日：1986-05-28

申请号：DE3174452

申请日：1981-06-10

Applicant: IBM

Inventor： HASSAN JAVATHU KUTIKARAN ,  PAIVANAS JOHN ANGELO

IPC: B65G49/07 ,  B65G51/03 ,  B65G53/24 ,  B65H20/10 ,  H01L21/677 ,  B65G51/00 ,  H01L21/68

公开(公告)号：DE3069019D1

公开(公告)日：1984-09-27

申请号：DE3069019

申请日：1980-08-29

Applicant: IBM

Inventor： HASSAN JAVATHU KUTIKARAN ,  PAIVANAS JOHN ANGELO

IPC: B01J19/08 ,  B01J19/26 ,  C23C14/34 ,  C23F4/00 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  C23F1/00

Abstract: A method and apparatus for obtaining a uniform gaseous molecular field under high vacuum conditions encountered in a dry etching process. In the method a source of a gas is provided and introduced into a manifold. The manifold feeds at least one nozzle and the gas is passed through the manifold and through the nozzle into a chamber maintained under vacuum conditions. The pressure of the gas and the configuration of the manifold and nozzle are such that the gas is caused to exit from the nozzle into the chamber under vacuum at sonic velocity.

公开(公告)号：DE2801624A1

公开(公告)日：1978-08-31

申请号：DE2801624

申请日：1978-01-14

Applicant: IBM

Inventor： HASSAN JAVATHU JUTIKARAN ,  PAIVANAS JOHN ANGELO

IPC: B65G49/07 ,  B65G51/03 ,  B65H29/24 ,  H01L21/22 ,  H01L21/677 ,  B65G51/02

Abstract: This specification deals with the stopping, positioning, orienting and redirecting a semiconductor wafer being transported along a track on an air film or bed of air. The stopping mechanism is an air jet located in a groove in the track, wafers passing over this air jet on an air film are sensed by a pneumatic sensor that turns on the air jet to set up an air stream under the transporting surface of the air film. This air stream sucks the fluid in the air film along with it in the groove causing a vacuum in the bed in the area of the nozzle of the air jet. The wafers are then stopped by the suction of the vacuum. Positioning, orienting and redirecting is done using the air jet and pneumatic sensor in combination with special air jet arrangements and operations.

公开(公告)号：DE3067695D1

公开(公告)日：1984-06-07

申请号：DE3067695

申请日：1980-08-29

Applicant: IBM

Inventor： HASSAN JAVATHU KUTIKARAN ,  PAIVANAS JOHN ANGELO

IPC: B65H23/18 ,  B25J15/06 ,  B65H3/14 ,  B66C1/02 ,  G01V9/00 ,  H05K13/02 ,  B65G47/91

Abstract: A contactless air film pick-up device utilizes the Bernoulli pressure-velocity relationship to provide a pick-up action, and, at the same time, generates a lateral restraining force centering the picked-up object. An air outlet opening (22) in the center of a flow boundary surface is surrounded by intake means (25) ahd, in a radially wider distance, by outlet means (27, 29). The lifting force is provided by air flow through the outlet opening (22), the centering force is generated by air flowfrom the outlet means (27,29) to the intake means (25).

公开(公告)号：DE2754228A1

公开(公告)日：1978-07-06

申请号：DE2754228

申请日：1977-12-06

Applicant: IBM

Inventor： HASSAN JAVATHU KUTIKARAN ,  PAIVANAS JOHN ANGELO

IPC: B65G49/07 ,  B65G51/03 ,  H01L21/677 ,  B65G51/02

Abstract: The transportation of semiconductor wafers along a track on an air film. The supporting air film is controlled by the track configuration and fluid relationships to eliminate the need of a wafer guide on restraint to keep the wafers on the track.

公开(公告)号：DE3372681D1

公开(公告)日：1987-08-27

申请号：DE3372681

申请日：1983-11-14

Applicant: IBM

Inventor： HASSAN JAVATHU KUTTIKARAN ,  PAIVANAS JOHN ANGELO

IPC: H01L21/677 ,  B65H3/08 ,  B65H3/14 ,  B65H5/14 ,  B65H5/22 ,  B66C1/00 ,  B66C1/02 ,  H01L21/683 ,  H01L21/68 ,  H01L21/00 ,  B65G47/91

Abstract: An aspirator jet suction pick-up device for moving green sheets or other flexible materials employs a source of gas under positive pressure into the head with exhaust via a network of slots disposed along the pick-up surface of the head. As the gas exhausts through the ends of the slots via a manifold or plenum, an open groove on the pick-up surface entrains aspirated air causing a localized suction force. The suction force due to aspiration uniformly and stably holds a flexible sheet on the pick-up surface.

公开(公告)号：DE3166874D1

公开(公告)日：1984-11-29

申请号：DE3166874

申请日：1981-12-16

Applicant: IBM

Inventor： DEROBERTIS IGNATIUS JOSEPH ,  HASSAN JAVATHU KUTIKARAN ,  JUDGE ROBERT LEWIS ,  PAIVANAS JOHN ANGELO

IPC: B65G49/07 ,  B65G51/03 ,  B65H5/22 ,  H01L21/677 ,  B65G51/02

Abstract: This transport system contains an air film shuttle conveyor (10) for conveying semiconductor chips (26) from a loading (20) to an unloading station (30), the conveyor comprising a base plate (42) and upstanding side walls (48) extending longitudinally of the base plate, the side walls being spaced apart a distance slightly greater than the lateral dimension of said chips; further included are means providing a laminar air flow which surrounds the chips and forms an air film supporting them and propelling them downstream such that the slight spacing between the chips and the side walls causes the flow resistance to be higher in the one regions defined by said slight spacing than in the region defined by the spacing between the chips, whereby a continuous and flexible separation action occurs between the chips.

公开(公告)号：DE3166421D1

公开(公告)日：1984-11-08

申请号：DE3166421

申请日：1981-04-28

Applicant: IBM

Inventor： HASSAN JAVATHU KUTIKARAN ,  PAIVANAS JOHN ANGELO

IPC: B65G49/07 ,  B65G51/03 ,  H01L21/67 ,  H01L21/677 ,  B65G51/02 ,  H05K13/02 ,  H01L21/68

Abstract: An air track system, preferably of axi-radial air tracks (22,23) with novel sections rotatable about a transverse axis in the plane of the track and normal to the travel of the objects, hereafter referred to as swivelators (30). Certain of the swivelators are formed with axial movable portions capable of moving beyond the plane of the air track surface and returning to the plane, so that these swivelators can pick up and set down objects (14) in predetermined positions in the manufacturing processing station (20,21) with an air force so as to not make physical contact with the objects. A novel gas lock device is positioned in the air track between those processing stations, in which the gas pressure must be separated so as to essentially eliminate the possibility of gas contaminant passing from one station to the next. The gas lock comprises an air track compartment having closable sides or panels in the path of the travel of the object being transported along the air track.