公开(公告)号：JP2000200877A

公开(公告)日：2000-07-18

申请号：JP36451099

申请日：1999-12-22

Applicant: IBM

Inventor： PETER RICHARD DANKUUMU ,  EDELSTEIN DANIEL CHARLES ,  LAIBOWITZ ROBERT BENJAMIN ,  DEBORAH ANNE NEWMEYER ,  NING TAK H ,  ROSENBERG ROBERT ,  THOMAS MAKAROORU SHOW

IPC: H01G4/33 ,  H01L21/02 ,  H01L21/316 ,  H01L21/822 ,  H01L23/522 ,  H01L23/532 ,  H01L23/64 ,  H01L27/04 ,  H01L27/105

Abstract: PROBLEM TO BE SOLVED: To ensure effective filtering action while reducing noise by employing an amorphous thin film material as a dielectric material having permittivity of a specified value or above being arranged between two electrodes. SOLUTION: A decoupling capacitor 10 is formed as a laminate where an amorphous dielectric thin film 12 is sandwiched between two electrodes 14, 16 of conductive layer containing TaN, Pt, Ir, ruthenium oxide, Al, Au, Cu, Ta, TaSiN and mixtures or a multiplayer thereof. The amorphous dielectric thin film 12 is composed of a perovskite-type oxide containing a titanate based dielectric, a manganate based material, a cuprite based material, a tungsten bronze type niobate, and tantalite wherein the perovskite-type oxide has permittivity higher than 10. Thus, effective filtering action can be ensured while reducing noise.