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公开(公告)号：GB2517854B
公开(公告)日：2016-08-31
申请号：GB201419746
申请日：2013-03-13
Applicant: IBM
Inventor： BRUCE B DORIS , KANGGUO CHENG , BALASUBRAMANIAN HARAN , ALI KHAKIFIROOZ , PRANITA KULKARNI , ARVIND KUMAR , SHOM PONOTH
IPC: H01L21/762 , H01L21/8238
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