Positioning of mask and substrate for solder bump process
    2.
    发明专利
    Positioning of mask and substrate for solder bump process 有权
    用于焊接工艺的掩模和基材的定位

    公开(公告)号:JP2006013137A

    公开(公告)日:2006-01-12

    申请号:JP2004188327

    申请日:2004-06-25

    CPC classification number: H01L2924/0002 H01L2924/014 H01L2924/00

    Abstract: PROBLEM TO BE SOLVED: To provide the positioning of a mask and a substrate for a solder bump process.
    SOLUTION: This system comprises a positioning fixture for temporarily holding the mask 145 and substrate 215 at mutual fixation positions, a holding means where a means 260 for holding the substrate with the reverse surface projects from the opening of a table and the opening of the fixture and is fixedly fitted onto a stage assembly 325, which can move in 1st and 2nd directions and rotate on an axis about the table, a means for temporarily fixing the fixture including the mask and substrate to the table, a means for controlling the means for temporary fixation so that a uniform force is generated around the peripheral part of the fixture, and a means for controlling the movement of the stage assembly in the 1st and 2nd directions and the rotation on the axis.
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供用于焊料凸块工艺的掩模和基板的定位。 解决方案:该系统包括用于在相互固定位置暂时保持掩模145和基板215的定位夹具,保持装置,其中用于保持具有反面的基板的装置260从工作台的开口突出,并且开口 并且固定地安装到台架组件325上,台架组件325可以在第一和第二方向上移动并围绕桌子绕轴线旋转;用于将包括面罩和基板的固定装置临时固定到工作台的装置,用于控制的装置 用于临时固定的装置,使得在固定装置的周边部分周围产生均匀的力;以及用于控制台架组件在第一和第二方向上的运动以及轴线上的旋转的装置。 版权所有(C)2006,JPO&NCIPI

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