Etching composition indication
    2.
    发明授权
    Etching composition indication 失效
    蚀刻组合物指示

    公开(公告)号:US3642549A

    公开(公告)日:1972-02-15

    申请号:US3642549D

    申请日:1969-01-15

    Applicant: IBM

    CPC classification number: C03C15/00 H01L21/31111 Y10T436/108331

    Abstract: In the etching through a protective glass coating to expose an underlying metal, overetching is prevented by adding a polyhydric alcohol, for example glycerin, to a glass etchant, which causes a color change on a metal, for example aluminum or molybdenum, indicating that etching through the glass coating has been completed.

    Abstract translation: 在通过保护性玻璃涂层进行蚀刻以暴露下面的金属时,通过向玻璃蚀刻剂中加入多元醇(例如甘油)来防止过蚀刻,这导致金属上的颜色变化,例如铝或钼,表明蚀刻 通过玻璃涂层已经完成。

    SELF ALIGNED SCHOTTKY GUARD RING
    7.
    发明专利

    公开(公告)号:CA1123121A

    公开(公告)日:1982-05-04

    申请号:CA337524

    申请日:1979-10-12

    Applicant: IBM

    Abstract: Self Aligned Schottky Guard Ring A method of forming a self aligned guard ring surrounding a schottky barrier diode device without requiring an enlargement of the final schottky barrier device. The method involves creating an overhanging opening in a insulator layer overlying a semiconductor body to expose the schottky contact area on the surface of the semiconductor body, depositing a diffusion barrier material such as molybdenum in the opening, the deposit being of the same size as the smallest part of the overhanging opening so that a guard ring can be formed from a vapor by diffusion around the deposited barrier material.

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