公开(公告)号：JPH07302759A

公开(公告)日：1995-11-14

申请号：JP3195295

申请日：1995-02-21

Applicant: IBM

Inventor： JIYONASAN DANIERU CHIYATSUPURU ,  RICHIYAADO ANSONII KONCHI ,  JIEEMUZU ANSONII ONIIRU ,  NARAYAANA BUII SARUMA ,  DONARUDO RESURII UIRUSON ,  JIYASUTEIN WAI CHIYOU UON

IPC: H01L21/205 ,  C23C16/40 ,  C23C16/44 ,  C23C16/448 ,  C23C16/52

Abstract: PURPOSE: To adjust a vapor send-out system, by bringing out a control signal for sending aluminum triisopropoxide(ATI) to a reactor or an exhaust pipe, by using a Fourier transform infrared(FTIR) spectrometer, in response to presence of contaminants and decomposition products in vapor stream. CONSTITUTION: When an FTIR spectrometer 5 analyzes reaction product vapor flowing in an IR cell 14, an information which shows whether contaminates or decomposition products exist is give to a process controller. Depending upon the composition of reaction product vapor which is harmful to a reactor or a workpiece in the reactor, the controller operates a valve 7, and stream of the reaction product vapor is changed so as to make it flow from a pipe 12 to a pump 13. When composition of the reaction product vapor is proper, the valve 7 is operated, and the reception product vapor is sent from a pipe 10 to a CVD reactor 11 to be fraught into reaction with the workpiece 15. Thereby, the reactor and the workpiece can be protected from the contaminants.