公开(公告)号：DE69309313T2

公开(公告)日：1997-09-25

申请号：DE69309313

申请日：1993-07-06

Applicant: IBM

Inventor： GERBER CHRISTOPH ,  GIMZEWSKI JAMES ,  REIHL BRUNO ,  SCHLITTLER RAETO

IPC: G01J3/42 ,  G01N25/22 ,  G01N13/10 ,  G01N13/16 ,  G01N21/27 ,  G01N25/34 ,  G01N25/36 ,  G01N25/48 ,  G01N27/00 ,  G01N37/00 ,  H01H1/00 ,  H01H37/52 ,  H01L41/08

Abstract: PCT No. PCT/EP94/00224 Sec. 371 Date Apr. 24, 1996 Sec. 102(e) Date Apr. 24, 1996 PCT Filed Jan. 27, 1994 PCT Pub. No. WO95/02170 PCT Pub. Date Jan. 19, 1995A spectrometer is described with a new intensity detector for electromagnetic radiation. The detector comprises means for detecting the deflection of a cantilever which has a bimetallic/bimorph structure. The deflection is proportional to the absorbed amount of radiation.

公开(公告)号：DE69309313D1

公开(公告)日：1997-04-30

申请号：DE69309313

申请日：1993-07-06

Applicant: IBM

Inventor： GERBER CHRISTOPH ,  GIMZEWSKI JAMES ,  REIHL BRUNO ,  SCHLITTLER RAETO

IPC: G01J3/42 ,  G01N25/22 ,  G01N13/10 ,  G01N13/16 ,  G01N21/27 ,  G01N25/34 ,  G01N25/36 ,  G01N25/48 ,  G01N27/00 ,  G01N37/00 ,  H01H1/00 ,  H01H37/52 ,  H01L41/08

Abstract: PCT No. PCT/EP94/00224 Sec. 371 Date Apr. 24, 1996 Sec. 102(e) Date Apr. 24, 1996 PCT Filed Jan. 27, 1994 PCT Pub. No. WO95/02170 PCT Pub. Date Jan. 19, 1995A spectrometer is described with a new intensity detector for electromagnetic radiation. The detector comprises means for detecting the deflection of a cantilever which has a bimetallic/bimorph structure. The deflection is proportional to the absorbed amount of radiation.