公开(公告)号：DE69309313D1

公开(公告)日：1997-04-30

申请号：DE69309313

申请日：1993-07-06

Applicant: IBM

Inventor： GERBER CHRISTOPH ,  GIMZEWSKI JAMES ,  REIHL BRUNO ,  SCHLITTLER RAETO

IPC: G01J3/42 ,  G01N25/22 ,  G01N13/10 ,  G01N13/16 ,  G01N21/27 ,  G01N25/34 ,  G01N25/36 ,  G01N25/48 ,  G01N27/00 ,  G01N37/00 ,  H01H1/00 ,  H01H37/52 ,  H01L41/08

Abstract: PCT No. PCT/EP94/00224 Sec. 371 Date Apr. 24, 1996 Sec. 102(e) Date Apr. 24, 1996 PCT Filed Jan. 27, 1994 PCT Pub. No. WO95/02170 PCT Pub. Date Jan. 19, 1995A spectrometer is described with a new intensity detector for electromagnetic radiation. The detector comprises means for detecting the deflection of a cantilever which has a bimetallic/bimorph structure. The deflection is proportional to the absorbed amount of radiation.

公开(公告)号：CA2165942A1

公开(公告)日：1995-01-19

申请号：CA2165942

申请日：1993-07-06

Applicant: IBM

Inventor： GERBER CHRISTOPH ,  GIMZEWSKI JAMES KAZIMIERZ ,  REIHL BRUNO ,  SCHLITTLER RATO RUDOLF

IPC: G01N25/34 ,  G01N25/36

Abstract: A calorimetric sensor is described, in which a bimetallic lever (21, 22) is combined with a chemical sensing layer (23), e.g. a catalyst, and a sensitive device (6) to determine any deflection of the bimetallic lever. Due to its high sensitivity, the new sensor is applicable in various technical fields.

公开(公告)号：CA1236592A

公开(公告)日：1988-05-10

申请号：CA495484

申请日：1985-11-15

Applicant: IBM

Inventor： BEDNORZ JOHANNES G ,  GIMZEWSKI JAMES K ,  REIHL BRUNO

IPC: H01J37/28 ,  H01J37/073 ,  H01J37/256 ,  G01N23/227

Abstract: Field-Emission Scanning Auger Electron Microscope The Auger electron microscope is equipped with a field-emission tip (10) maintained at an essentially constant distance above the surface of the specimen (7). The tip (10) may consist of a tungsten (100) whisker having a radius of ~50 nm at the apex, the working distance being on the order of 1mm. Auger electrons emitted from the surface of the specimen (7) are collected by an electron energy analyzer (11) for conventional processing. Mutual scanning displacement between tip (10) and specimen (7) is obtained by an xyz-drive module (6) which is also responsible for adjusting the working distance of the tip (10). The entire microscope set-up is mounted on vibration damping means (4, 5) and may be inserted into a vacuum system by means of an appropriate flange (1), if need be.

公开(公告)号：DE69309313T2

公开(公告)日：1997-09-25

申请号：DE69309313

申请日：1993-07-06

Applicant: IBM

Inventor： GERBER CHRISTOPH ,  GIMZEWSKI JAMES ,  REIHL BRUNO ,  SCHLITTLER RAETO

IPC: G01J3/42 ,  G01N25/22 ,  G01N13/10 ,  G01N13/16 ,  G01N21/27 ,  G01N25/34 ,  G01N25/36 ,  G01N25/48 ,  G01N27/00 ,  G01N37/00 ,  H01H1/00 ,  H01H37/52 ,  H01L41/08

Abstract: PCT No. PCT/EP94/00224 Sec. 371 Date Apr. 24, 1996 Sec. 102(e) Date Apr. 24, 1996 PCT Filed Jan. 27, 1994 PCT Pub. No. WO95/02170 PCT Pub. Date Jan. 19, 1995A spectrometer is described with a new intensity detector for electromagnetic radiation. The detector comprises means for detecting the deflection of a cantilever which has a bimetallic/bimorph structure. The deflection is proportional to the absorbed amount of radiation.