公开(公告)号：DE3376036D1

公开(公告)日：1988-04-21

申请号：DE3376036

申请日：1983-08-17

Applicant: IBM DEUTSCHLAND ,  IBM

Inventor： HINKEL HOLGER DR ,  KAUS GERHARD DR ,  KUNZEL ULRICH DR ,  SCHMID GERHARD DR

IPC: G11B5/10 ,  G11B5/187 ,  G11B5/31 ,  G11B5/60 ,  G11B21/21 ,  G11B5/127

Abstract: The magnetic head block is made from a flat workpiece with one of its longitudinal side faces provided with a series of pairs of magnetic heads (12) each haVing associated conductor leads. Between each two adjacent pairs of magnetic heads (12) a transverse separation slit is formed and a transverse recess (9) if formed between the heads (12) of each pair to provide the two slide runners (11). The latter are angle downwards at the end of the block opposite to the magnetic heads (12). For mfr. of the slide runners (11) the surface of the aluminium workpiece (1) is provided with an Al oxide layer with a thickness of at least 1mm, used as a mask for etching the transVerse recesses (9) which have a depth of at least 10 microns.

公开(公告)号：DE3071288D1

公开(公告)日：1986-01-23

申请号：DE3071288

申请日：1980-09-19

Applicant: IBM DEUTSCHLAND ,  IBM

Inventor： HINKEL HOLGER DR ,  KEMPF JURGEN DR ,  KRAUS GEORG ,  SCHMID GERHARD DR

IPC: H01L21/266 ,  H01L21/265 ,  H01L21/316

公开(公告)号：DE3070833D1

公开(公告)日：1985-08-08

申请号：DE3070833

申请日：1980-09-19

Applicant: IBM DEUTSCHLAND ,  IBM

Inventor： GRESCHNER JOHANN DR ,  KRAUS GEORG ,  SCHMID GERHARD DR

IPC: C30B33/00 ,  G03F1/20 ,  H01L21/027 ,  H01L29/06 ,  H01L21/00 ,  G03F1/00 ,  H01L23/52 ,  H01L29/40

Abstract: A structure for shaping or masking energetic radiation is described. The structure comprises a shallow silicon body having at least one through opening, and a metal silicide layer covering the surface of the structure. The structure characterized by having a high mechanical, and thermal stability may be used particularly in electron and X-ray lithography. More specifically, the structure may be used as an aperture for electron beams, or as a mask for X-rays. The production of the structure includes the steps of making through openings in the silicon body, and the forming of the silicide layer by vapor depositing a metal on the surface of the silicon body and by subsequent annealing.

公开(公告)号：DE4417132A1

公开(公告)日：1995-11-23

申请号：DE4417132

申请日：1994-05-17

Applicant: IBM

Inventor： BAYER THOMAS ,  GRESCHNER JOHANN DR ,  SCHMID GERHARD DR ,  WOLF VOLKER DR

IPC: G01B21/30 ,  B81B3/00 ,  G01D21/02 ,  G01H13/00 ,  G01L5/00 ,  G01N29/02 ,  G01N37/00 ,  G01P15/097 ,  G01P15/10 ,  G01Q60/30 ,  G01Q60/38 ,  G01Q70/10 ,  H03H9/24 ,  H03H9/50 ,  H03H9/56 ,  G01B5/28 ,  H01L49/00

Abstract: A resonant measurement value sensor with a resonating body (10) for determining at least two physical values is characterised in that the resonating body (10) has at least two partial bodies (1, 2). The resonating body as a whole (10) is suitable for determining one of both values, and one of the partial bodies (1, 2) or a composite made up of several partial bodies is suitable for determining the other value. The individual partial bodies (1, 2) of the resonating bodies may have different geometric sizes or be composed of different materials. The individual physical values are measured in a base mode of the resonating body as a whole (10) or of the corresponding partial body (1, 2). When such a measurement value sensor with a resonating body designed as a double flexible beam (10) and a fine point (21) is used as a measurement probe in scanning Kelvin probe force microscopy, the surface potential of the surface (30) of the object to be examinated may be measured with high lateral resolution.

公开(公告)号：DE4417132C2

公开(公告)日：1996-08-14

申请号：DE4417132

申请日：1994-05-17

Applicant: IBM

Inventor： BAYER THOMAS ,  GRESCHNER JOHANN DR ,  SCHMID GERHARD DR ,  WOLF VOLKER DR

IPC: G01B21/30 ,  B81B3/00 ,  G01D21/02 ,  G01H13/00 ,  G01L5/00 ,  G01N29/02 ,  G01N37/00 ,  G01P15/097 ,  G01P15/10 ,  G01Q60/30 ,  G01Q60/38 ,  G01Q70/10 ,  H03H9/24 ,  H03H9/50 ,  H03H9/56 ,  G01B5/28 ,  H01L49/00

Abstract: PCT No. PCT/EP94/03257 Sec. 371 Date Nov. 15, 1996 Sec. 102(e) Date Nov. 15, 1996 PCT Filed Sep. 29, 1994 PCT Pub. No. WO95/31693 PCT Pub. Date Nov. 23, 1995The invention relates to a resonant sensor with a vibrating body (10) for the determination of at least two physical values characterised by the fact that the vibrating body (10) has at least two partial bodies (1, 2), the vibrating body as a whole (10) being appropriate for the determination of one of the two values and one of the partial bodies (1, 2) or a combination of several partial bodies is appropriate for the determination of the other of the two values. The individual partial bodies (1, 2) of the vibrating body can differ both in their geometric, dimensions and or in the materials of which they are composed. The measurement of the individual physical values takes place in a fundamental mode of the vibrating body as a whole (10) or of the relevant partial body (1, 2). If a resonant sensor of this type with a vibrating body in the form of a double transverse beam (10) and a fine tip (21) is used as a sensing probe in Scanning Kelvin Probe Force Microscopy, the surface potential of the surface (30) of the object under examination can be measured with a high degree of lateral resolution.