公开(公告)号：DE4417132A1

公开(公告)日：1995-11-23

申请号：DE4417132

申请日：1994-05-17

Applicant: IBM

Inventor： BAYER THOMAS ,  GRESCHNER JOHANN DR ,  SCHMID GERHARD DR ,  WOLF VOLKER DR

IPC: G01B21/30 ,  B81B3/00 ,  G01D21/02 ,  G01H13/00 ,  G01L5/00 ,  G01N29/02 ,  G01N37/00 ,  G01P15/097 ,  G01P15/10 ,  G01Q60/30 ,  G01Q60/38 ,  G01Q70/10 ,  H03H9/24 ,  H03H9/50 ,  H03H9/56 ,  G01B5/28 ,  H01L49/00

Abstract: A resonant measurement value sensor with a resonating body (10) for determining at least two physical values is characterised in that the resonating body (10) has at least two partial bodies (1, 2). The resonating body as a whole (10) is suitable for determining one of both values, and one of the partial bodies (1, 2) or a composite made up of several partial bodies is suitable for determining the other value. The individual partial bodies (1, 2) of the resonating bodies may have different geometric sizes or be composed of different materials. The individual physical values are measured in a base mode of the resonating body as a whole (10) or of the corresponding partial body (1, 2). When such a measurement value sensor with a resonating body designed as a double flexible beam (10) and a fine point (21) is used as a measurement probe in scanning Kelvin probe force microscopy, the surface potential of the surface (30) of the object to be examinated may be measured with high lateral resolution.

公开(公告)号：DE4417132C2

公开(公告)日：1996-08-14

申请号：DE4417132

申请日：1994-05-17

Applicant: IBM

Inventor： BAYER THOMAS ,  GRESCHNER JOHANN DR ,  SCHMID GERHARD DR ,  WOLF VOLKER DR

IPC: G01B21/30 ,  B81B3/00 ,  G01D21/02 ,  G01H13/00 ,  G01L5/00 ,  G01N29/02 ,  G01N37/00 ,  G01P15/097 ,  G01P15/10 ,  G01Q60/30 ,  G01Q60/38 ,  G01Q70/10 ,  H03H9/24 ,  H03H9/50 ,  H03H9/56 ,  G01B5/28 ,  H01L49/00

Abstract: PCT No. PCT/EP94/03257 Sec. 371 Date Nov. 15, 1996 Sec. 102(e) Date Nov. 15, 1996 PCT Filed Sep. 29, 1994 PCT Pub. No. WO95/31693 PCT Pub. Date Nov. 23, 1995The invention relates to a resonant sensor with a vibrating body (10) for the determination of at least two physical values characterised by the fact that the vibrating body (10) has at least two partial bodies (1, 2), the vibrating body as a whole (10) being appropriate for the determination of one of the two values and one of the partial bodies (1, 2) or a combination of several partial bodies is appropriate for the determination of the other of the two values. The individual partial bodies (1, 2) of the vibrating body can differ both in their geometric, dimensions and or in the materials of which they are composed. The measurement of the individual physical values takes place in a fundamental mode of the vibrating body as a whole (10) or of the relevant partial body (1, 2). If a resonant sensor of this type with a vibrating body in the form of a double transverse beam (10) and a fine tip (21) is used as a sensing probe in Scanning Kelvin Probe Force Microscopy, the surface potential of the surface (30) of the object under examination can be measured with a high degree of lateral resolution.