公开(公告)号：DE60138161D1

公开(公告)日：2009-05-14

申请号：DE60138161

申请日：2001-02-15

Applicant: IBM

Inventor： CHAN KEVIN K ,  SHI LEATHEN ,  ZIEGLER JAMES F ,  JHANES CHRISTOPHER ,  SPEIDEL JAMES L

IPC: H03H9/05 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  H03D7/00 ,  H03D9/06 ,  H03H3/007 ,  H03H9/10 ,  H03H9/24 ,  H03H9/46 ,  H04B1/26

Abstract: Communication signal mixing and filtering systems and methods utilizing an encapsulated micro electro-mechanical system (MEMS) device. Furthermore, disclosed is a method of fabricating a simple, unitarily constructed micro electro-mechanical system (MEMS) device which combines the steps of signal mixing and filtering, and which is smaller, less expensive and more reliable in construction and operation than existing devices currently employed in the technology.