WAFER MOUNTING
    1.
    发明专利

    公开(公告)号:GB1267320A

    公开(公告)日:1972-03-15

    申请号:GB5576270

    申请日:1970-11-24

    Applicant: IBM

    Abstract: 1,267,320. Seaming. INTERNATIONAL BUSINESS MACHINES CORP. 24 Nov., 1970 [30 Dec., 1969], No. 55762/70. Heading B5K. [Also in Divisions B3 and H1] A semi-conductor wafer 25 is bonded to a surface 17 of a support 10, which surface is flat when cool but convex as shown when hot, by heating the support 10 to the bonding temperature, spreading a bonding agent over the surface 17, placing the wafer 25 into contact with the highest point of the surface 17, e.g. using a rubber-coated vacuum tool, and maintaining the wafer 25 in contact with the surface 17 while the support 10 cools down and resumes its flat shape. The bonding agent is thus forced outwards from the highest point of the surface 17 as the latter cools, and voids in the bonding layer are avoided. After mounting in this way the wafer 25 may be cut into chips for device manufacture. The support 10 is preferably made of a phenolic resin, the bonding agent being glycol phthalate and being preheated and applied in a metered amount to the surface 17. A concave cooled forming tool is used to shape the bonding agent over the surface 17 prior to positioning of the wafer 25.

    GREEN SHEET SUPPORT FIXTURE SPEED AND POSITION CONTROL SYSTEM FOR A SCREENING MACHINE

    公开(公告)号:DE3168782D1

    公开(公告)日:1985-03-21

    申请号:DE3168782

    申请日:1981-08-19

    Applicant: IBM

    Abstract: A horizontally movable slide (64) bears a two section, continuously extending horizontally inclined, steep (66b) and shallow (66a) sloped cam slot controlling the vertical rise and fall of a cam follower (76) driven support fixture (38) for supporting a ceramic green sheet in underlying contact with a stencil mask in an automatic MLC screening machine. An apertured positioning flag (90) moves horizontally with the slide (64) and past a vertical height digital position encoder assembly (100) and a mask separate encoder assembly (102). The positioning encoder assembly (100) provides an electrical signal for controlling an actuator mechanism (80) causing slide movement, indicative of the desired final positioning height of the green sheet relative to the mask when the fixture is moving towards the mask. When the actuator mechanism (80) drives the slide (64) in the opposite direction, to lower the green sheet from the mask, the mask separate encoder assembly (102) produces a signal, in response to common positioning flag movement in the opposite direction with the slide to effect a change in speed of the actuator mechanism. This provides slow initial separation of the green sheet from the mask and final removal of the fixture from screening height, at a much more rapide rate.

    MASK CLEANING APPARATUS AND AUTOMATIC MULTILAYER CERAMIC SCREENING MACHINE INCORPORATING SAME

    公开(公告)号:DE3162887D1

    公开(公告)日:1984-05-03

    申请号:DE3162887

    申请日:1981-08-19

    Applicant: IBM

    Abstract: Vertically displaceable green sheet support fixtures are borne by respective horizontally movable carriages traveling on common rails between respective dual loading stations and a common unloading station, through separate intermediate screening stations, with the carriages movable in opposite directions and out of phase stationwise. The carriages have fixedly coupled thereto, horizontally movable trailers which bear trays of stacked green sheets for selective transfer of the uppermost green sheet to a loading head at the loading station while the carriage borne fixture itself is at a screening station for paste screening of a prior transferred green sheet. Masks employed in screen printing at the screening station are removed from the screening station console and placed in a cleaning chamber for solvent removal of residual screening paste and are air dried prior to return to the screening station console. During cleaning of a dirty mask, a second clean mask is automatically presented at the station to eliminate throughput-loss. The fixture is vertically displaceable on the carriage and its height incrementally varied depending upon green sheet thickness variation. Accelerated vertical separation of the carriage borne green sheet from the mask is effected subsequent to initial slow incremental separation therebetween.

    4.
    发明专利
    未知

    公开(公告)号:DE3679205D1

    公开(公告)日:1991-06-20

    申请号:DE3679205

    申请日:1986-01-17

    Applicant: IBM

    Abstract: Centerfold forming apparatus for making an envelope for a plastic disk from a prepunched, flexible, plastic blank having two sections connected at the heads thereof and containing a drive hole at the same location in each section; the flexible plastic material blank (10) is held against two outward surfaces (32,33) of a first and second folding plate (21,23) that are pivoted in the middle (28) so that the plates (21, 23) are driven in an arcuate path until said outward surfaces (32,33) are positioned in vertical planes facing each other; the drive holes in each section of the flexible blank are fitted over respective hubs (35,35 min ) located in the same location in said surface (32,33) of each first and second folding plate (21,23); a mandrel (34) which is extendable vertically and has an edge thereof in the extended position pressing against the blank (10) in the area between the first and second plates pulling the drive holes in the blank taut on said hubs (35,35 min ) thereby locating the centerline of said blank; drive means moving the folding plates (21,23) from the horizontal to the vertical facing position causing said blank (10) to bend along the pressing edge of said mandrel (34) forming the centerfold; heating means are provided for heating the centerfold to a predetermined temperature to anneal the material thereby reducing internal stresses therein.

    METHOD AND APPARATUS FOR ALIGNING FLAT AND THIN WORKPIECES

    公开(公告)号:DE2861869D1

    公开(公告)日:1982-07-15

    申请号:DE2861869

    申请日:1978-12-07

    Applicant: IBM

    Abstract: A method and apparatus permitting accurate and repeatable steps of location and alignment of flimsy sheets during their transfer. A preferred embodiment comprises a sheet handler and method for aligning unfired ceramic green sheets used in multi-layer ceramic semiconductor packages. The thin flexible sheets are square or rectangular in shape and are provided with holes accurately punched in each corner thereof for alignment purposes. The sheets are moved by a vacuum input transfer head into orientation with a porous registration surface of an alignment fixture. The sheet is then trapped between opposed pressure zones emanating from the input transfer head and through the porous registration surface, respectively. With the sheet stabilized between the pressure zones four bullet-nosed alignment pins are raised from the registration surface into contact with the holes in the corners of the green sheet, thereby accurately aligning the sheet with respect to the alignment fixture. The input transfer head is then withdrawn and an output transfer head picks up the aligned sheet via vacuum means and transfers it to other processing locations. In an alternate embodiment the pressure zones are created between the output transfer head and the registration surface of the alignment fixture.

    6.
    发明专利
    未知

    公开(公告)号:DE3679414D1

    公开(公告)日:1991-07-04

    申请号:DE3679414

    申请日:1986-01-17

    Applicant: IBM

    Abstract: Apparatus for forming side flap folds in an envelope for a flexible disk wherein the envelope is formed from a flexible plastic prepunched blank having two connected sections. One section of the blank has side flaps extending from the opposite side edges. The blank is folded about an end of a mandrel (34) so that the side flaps (17) extend beyond the side edges of the mandrel. The mandrel (34) holds the plastic blank section having the flaps extending therefrom against the bottom surface of a plate (23). The mandrel has raised edge portions running along the side edges on the outward facing surface thereof. The side flaps (17) are folded around the adjacent edge of the mandrel (34) in an outward folding direction by folding blades (44) which are driven about pivot means (52) to guide the folding blades (44) in an arcuate path. Stops (64) are provided which stop the arcuate motion of the folding blades (44) and allow the upward motion means (54,68) associated with the pivot means (52) in response to the drive means (60) to cause compression of said flaps (17) against the adjacent blank section (16) and mandrel (34) by said folding blades (44) beyond said raised edge portions providing overfold zones adjacent thereto. Infra-red heating means are operable through guide openings (74) in the folding blades (44) adjacent the side folds to provide annealing of the fold thereby relieving any stresses therein.

    VACUUM PICK-UP HEAD FOR SMOOTH, FLIMSY WORKPIECES

    公开(公告)号:DE2862037D1

    公开(公告)日:1982-11-04

    申请号:DE2862037

    申请日:1978-12-12

    Applicant: IBM

    Abstract: A vacuum pick up and transfer head adapted for handling flimsy sheets of material such as spacer sheet and uncured ceramic sheet commonly referred to as green sheet. The vacuum transfer head is of generally rectangular configuration having a sheet contacting lip having vacuum slots formed through the periphery thereof to hold the sheets in place by vacuum pressure. The center of the sheet contacting face is recessed whereby, with a sheet in place and acting as a diaphragm, a central vacuum chamber is also defined. A series of check valves are provided to control application of vacuum and positive pressure to the green sheet for picking the sheet up, retaining it and stripping it. A plurality of probes are provided in the handling head, adapted to selectively project through the sheet contacting surface for detecting green sheet and/or spacer sheet utilized inbetween layers of green sheet. These probes also can act as positive strippers when the head enters a green sheet spacer tray in the process of removing a sheet of spacer or green sheet.

    8.
    发明专利
    未知

    公开(公告)号:DE2241905A1

    公开(公告)日:1973-03-08

    申请号:DE2241905

    申请日:1972-08-25

    Applicant: IBM

    Abstract: The invention is a method of automatically bonding elongated articles such as headed pins to metallized contact pads on a ceramic substrate. The elongate articles are automatically inserted into the carrier by (1) placing the carrier in a carrier support, (2) releasing elongate articles onto the carrier, (3) vibrating the support to vibrate the carrier and agitate the elongated articles, (4) applying a pressure differential between the tops and the bottoms of the holes to create air flow into the tops of the holes to suck the elongate articles into the holes, and (5) periodically reducing the pressure differential to allow the vibration to dislodge any jammed articles. The frequency and amplitude of the vibration and the duty cycle and period of the pressure differential are adjusted to dislodge jammed articles during the time the pressure differential is reduced, while retaining in the holes the elongate articles which have been inserted into the holes in a proper orientation. The bonding method comprises the steps of (1) inserting the elongate articles into holes in a carrier, (2) removing any excess articles, (3) masking the carrier to prevent bonding material adhering to the carrier, applying bonding material to the ends of the elongate articles in accordance with the mask, (5) bringing the ends of the elongate articles into contact with the contact points on the substantially flat surface to which the articles are to be bonded, (6) applying pressure to each elongate article individually, (7) heating the contact points on the substrate surface and the elongate articles to form a permanent bond between them and (8) cooling the elongate atticles and contact points to allow the bonding material to set.

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