公开(公告)号：JP2002107758A

公开(公告)日：2002-04-10

申请号：JP2000287410

申请日：2000-09-21

Applicant: IBM

Inventor： TAKASUGI CHIKATOMO ,  IKEZAKI MITSURU

IPC: G02F1/136 ,  G02F1/1362 ,  G02F1/1368 ,  G09F9/00 ,  G09F9/30

Abstract: PROBLEM TO BE SOLVED: To obtain a method for manufacturing a liquid crystal display device by which changes in the luminance in the sub-pixel part which comprises double exposure part(s) can be prevented. SOLUTION: In the patterning process of a TFT array substrate for a liquid crystal display device, the substrate is subjected to division exposure. In the exposure process of a resist, the substrate is divided into a plurality of fractions and exposed by using a stepper. The part where two division exposure regions are overlapped includes a part subjected to double exposure by considering the exposure error. The double exposure part is established into a non-linear form in the sub-pixel part. By establishing like this, the double exposure part is not overlapped with a storage capacitance or signal lines. Thus, changes in the capacitance in the storage capacitance between the signal lines and pixel electrodes can be prevented and irregular display or changes in the luminance can be prevented.

公开(公告)号：JP2001281689A

公开(公告)日：2001-10-10

申请号：JP2000092738

申请日：2000-03-30

Applicant: IBM

Inventor： TAKASUGI CHIKATOMO ,  HAYASHI KATSURO

IPC: G02F1/13 ,  G02F1/1333 ,  G02F1/1335 ,  G02F1/1343 ,  G02F1/1345 ,  G02F1/136 ,  G02F1/1368 ,  G09F9/00

Abstract: PROBLEM TO BE SOLVED: To obtain a liquid crystal display device, which can inspect a connection state of a transfer, and its inspecting method, while ensuring the electrical connection of a pad and the transfer. SOLUTION: In the electrically conductive pad 1008 of the transfer which electrically connects two substrates, a light transparent part 1102 is formed by using an ITO. The connection state of the transfer 1003 connected to an opposite side through the light transmitting part can be verified visually. The light transmitting part adjacent to the going around direction of the pad is placed at 90 deg. angle nearly perpendicular, and two mutually opposing transmitting parts are placed in the radial direction in nearly parallel. Because the light transparent part is formed in the electrically conductive pad by the ITO, the connection state of the transfer can be inspected from an array substrate side, and the electrical conductivity is also ensured.

公开(公告)号：JP2002040481A

公开(公告)日：2002-02-06

申请号：JP2000222318

申请日：2000-07-24

Applicant: IBM

Inventor： TAKASUGI CHIKATOMO ,  IIYORI HIDEO

IPC: G02F1/1343 ,  G02F1/136 ,  G02F1/1362 ,  G02F1/1368 ,  G09F9/00 ,  G09F9/30 ,  H01L29/786

Abstract: PROBLEM TO BE SOLVED: To obtain a liquid crystal display device which can prevent wires from short-circuiting to each other. SOLUTION: A TFT(Thin Film Transistor) array substrate has a dummy signal line 36 as a short-circuit wire so as to prevent a short circuit due to electrostatic destruction to a gate line as a low-layer wire. The dummy signal line 36 is formed in the outer peripheral area 32 of the TFT array substrate. This dummy signal line 36 has a three-layered structure of a silicon lower layer, an ITO(Indium Tin Oxide) intermediate layer, and an aluminum(Al) upper layer from below. The silicon layer formed as one continuous wire as well as the Al layer are etched simultaneously when the Al layer is patterned, so that the silicon layer is electrically broken between gate lines. The dummy wire is broken after formed, so even if the dummy wire and >=2 gate lines are short-circuited, there is no short circuit between the gate lines.