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公开(公告)号:JP2002314258A
公开(公告)日:2002-10-25
申请号:JP2002075801
申请日:2002-03-19
Applicant: IBM
Inventor: ANSTROM DONALD O , CHAMBERLIN BRUCE J , LAUFFER JOHN M , MARKOVICH VOYA R , THOMAS DAVID L
IPC: H01L23/538 , H05K1/02 , H05K3/46
Abstract: PROBLEM TO BE SOLVED: To provide a method and structure for realizing close wiring, which can exhibit excellent electric characteristics, while satisfying system resistance requirements and characteristic impedance requirements in a printed circuit board applied product or in a chip carrier applied product. SOLUTION: For close wiring, wiring length is selected to enable use of an allowable 'short' wiring as close circuit lines, or short-length wiring lines are provided in a necessary region and switched to possible rough wiring lines of low-resistance. In order to ensure that the resistance of the longest wiring used will not exceed a predetermined maximum resistance, all the wirings are required to have sufficient sectional areas. Provision of a burial via enables change to a low-resistance wiring to form a dense wiring in the element region.