公开(公告)号：DE3880823T2

公开(公告)日：1993-10-28

申请号：DE3880823

申请日：1988-12-15

Applicant: IBM

Inventor： MCKEAN DENNIS RICHARD ,  MILLER ROBERT DENNIS ,  WALSH JOSEPH GREGORY ,  WILLSON CARLTON GRANT

IPC: C07C309/76 ,  C07C67/00 ,  C07C301/00 ,  G03C1/72 ,  G03C1/73 ,  G03F7/022

Abstract: Esters of 1-oxo-2-diazo-naphthalene sulfonic acid wherein the sulfonic acid group is at either the 4 or the 5 position of a hydroxymethyl-tricyclo [5.2.1.0 ] decane wherein the hydroxy group is either at the 3 or 4 position and useful as sensitizers for positive resists, particularly relatively thick resists at 365 nm.

公开(公告)号：DE3880823D1

公开(公告)日：1993-06-09

申请号：DE3880823

申请日：1988-12-15

Applicant: IBM

Inventor： MCKEAN DENNIS RICHARD ,  MILLER ROBERT DENNIS ,  WALSH JOSEPH GREGORY ,  WILLSON CARLTON GRANT

IPC: C07C309/76 ,  C07C67/00 ,  C07C301/00 ,  G03C1/72 ,  G03C1/73 ,  G03F7/022

Abstract: Esters of 1-oxo-2-diazo-naphthalene sulfonic acid wherein the sulfonic acid group is at either the 4 or the 5 position of a hydroxymethyl-tricyclo [5.2.1.0 ] decane wherein the hydroxy group is either at the 3 or 4 position and useful as sensitizers for positive resists, particularly relatively thick resists at 365 nm.