Method and apparatus for coating a substrate by utilizing the hollow cathode effect with rf sputtering
    2.
    发明授权
    Method and apparatus for coating a substrate by utilizing the hollow cathode effect with rf sputtering 失效
    通过使用RF溅射使用中空阴影效应来涂覆基板的方法和装置

    公开(公告)号:US3627663A

    公开(公告)日:1971-12-14

    申请号:US3627663D

    申请日:1968-03-25

    Applicant: IBM

    CPC classification number: C23C14/35 H01J37/34

    Abstract: A substrate to be coated by RF sputtering is partially or completely surrounded by a target, which has a similarly shaped cathode surrounding and supporting the target. The target and the cathode may be formed of a pair of parallel plates or a hollow member. By controlling the pressure of the gas within the partially evacuated chamber in which at least the target is disposed and/or the spacing of the cathode plates or the size and geometrical configuration of the hollow member, a single common negative glow can be produced by either having the negative glow from the two parallel cathode plates overlap or touch each other or having a single negative glow within the hollow member.

    PROTECTION OF TERMINAL METALLURGY DURING WORKING AND REWORKING OF GAS DISCHARGE DISPLAY DEVICES

    公开(公告)号:CA959115A

    公开(公告)日:1974-12-10

    申请号:CA156039

    申请日:1972-11-08

    Applicant: IBM

    Abstract: A water removable material ordinarily used as a brazing stop-off - i.e. to restrict the flow of a molten metal and thereby to prevent wetting of an underlying surface in a brazing or soldering process - has been found useful presently as a means to prevent oxidation of, or other damage to, terminal metallurgy of metallized glass components during protracted periods of baking, gas-filling and glass sealing processing incidental to fabrication of gas discharge display panel assemblies. The subject baking, gas-filling and sealing processing involves hours or even days of variant temperature treatment, which should be distinguished from seconds or at most minutes of brazing treatment. The protective function required of the water removable coating during this prolonged processing period is considered unique and eliminates certain application and removal process operations associated with the use of other protective media (e.g. sintered glass frit).

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