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公开(公告)号：SG111054A1
公开(公告)日：2005-05-30
申请号：SG200202066
申请日：2002-04-08
Applicant: IBM
Inventor： CYRIL CABRAL JR , KEVIN K CHAN , GUY MOSHE COHEN , KATHRYN WILDER GUARINI , CHRISTIAN LAVOIE , PAUL MICHAEL SOLOMON , YING ZHANG
IPC: H01L21/28 , H01L21/285 , H01L21/336 , H01L29/45 , H01L29/786 , H01L21/84
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