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1.发明公开METHOD AND APPARATUS FOR ACCELERATED DETERMINATION OF ELECTROMIGRATION CHARACTERISTICS OF SEMICONDUCTOR WIRING 审中-公开方法和装置半导体布线电迁移自己的特色加速测定法
公开(公告)号：EP1438595A4
公开(公告)日：2009-11-04
申请号：EP02782155
申请日：2002-10-11
Applicant: IBM , INFINEON TECHNOLOGIES CORP
Inventor： FILIPPI RONALD G JR , STRONG ALVIN W , SULLIVAN TIMOTHY D , TIBEL DEBORAH , RUPRECHT MICHAEL , GRAAS CAROLE
IPC: G01R31/26 , H01L21/66 , H01L23/544 , G01R31/28
CPC classification number: H01L22/34 , G01R31/2858 , H01L2924/0002 , H01L2924/3011 , H01L2924/00
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