公开(公告)号：US20130187669A1

公开(公告)日：2013-07-25

申请号：US13746149

申请日：2013-01-21

Applicant: IMEC

Inventor： Murali Jayapala ,  Geert Van Der Plas ,  Veronique Rochus ,  Xavier Rottenberg ,  Simone Severi ,  Stéphane Donnay

IPC: G02B27/00

CPC classification number: G02B27/00 ,  G02B1/00 ,  G02B6/352 ,  G02B6/359 ,  G02B26/0825 ,  G02B26/0841 ,  G02B2207/00 ,  H04N1/00

Abstract: A built-in self-calibration system and method for a micro-mirror array device, for example, operating as a variable focal length lens is described. The calibration method comprises determining a capacitance value for each micro-mirror element in the array device at a number of predetermined reference angles to provide a capacitance-reference angle relationship. From the capacitance values, an interpolation step is carried to determine intermediate tilt angles for each micro-mirror element in the array. A voltage sweep is applied to the micro-mirror array and capacitance values, for each micro-mirror element in the array, are measured. For a capacitance value that matches one of the values in the capacitance-reference angle relationship, the corresponding voltage is linked to the associated tilt angle to provide a voltage-tilt angle characteristic which then stored in a memory for subsequent use.

Abstract translation: 描述了用作微反射镜阵列器件的内置自校准系统和方法，例如作为可变焦距透镜操作。 校准方法包括以多个预定参考角度确定阵列器件中的每个微镜元件的电容值，以提供电容参考角度关系。 根据电容值，进行插值步骤以确定阵列中的每个微镜元件的中间倾斜角度。 对微镜阵列施加电压扫描，并测量阵列中每个微镜元件的电容值。 对于与电容参考角度关系中的一个值匹配的电容值，相应的电压与相关联的倾斜角度相关联，以提供电压倾斜角特性，然后将其存储在存储器中用于随后的使用。

公开(公告)号：US09201241B2

公开(公告)日：2015-12-01

申请号：US13746149

申请日：2013-01-21

Applicant: IMEC

Inventor： Murali Jayapala ,  Geert Van Der Plas ,  Veronique Rochus ,  Xavier Rottenberg ,  Simone Severi ,  Stéphane Donnay

IPC: G01R27/26 ,  G02B27/00 ,  G02B1/00 ,  H04N1/00 ,  G02B6/35 ,  G02B26/08

CPC classification number: G02B27/00 ,  G02B1/00 ,  G02B6/352 ,  G02B6/359 ,  G02B26/0825 ,  G02B26/0841 ,  G02B2207/00 ,  H04N1/00

Abstract: A built-in self-calibration system and method for a micro-mirror array device, for example, operating as a variable focal length lens is described. The calibration method comprises determining a capacitance value for each micro-mirror element in the array device at a number of predetermined reference angles to provide a capacitance-reference angle relationship. From the capacitance values, an interpolation step is carried to determine intermediate tilt angles for each micro-mirror element in the array. A voltage sweep is applied to the micro-mirror array and capacitance values, for each micro-mirror element in the array, are measured. For a capacitance value that matches one of the values in the capacitance-reference angle relationship, the corresponding voltage is linked to the associated tilt angle to provide a voltage-tilt angle characteristic which then stored in a memory for subsequent use.

Abstract translation: 描述了用作微反射镜阵列器件的内置自校准系统和方法，例如作为可变焦距透镜操作。 校准方法包括以多个预定参考角度确定阵列器件中的每个微镜元件的电容值，以提供电容参考角度关系。 根据电容值，进行插值步骤以确定阵列中的每个微镜元件的中间倾斜角度。 对微镜阵列施加电压扫描，并测量阵列中每个微镜元件的电容值。 对于与电容参考角度关系中的一个值匹配的电容值，相应的电压与相关联的倾斜角度相关联，以提供电压倾斜角特性，然后将其存储在存储器中用于随后的使用。