公开(公告)号：NL1025104C2

公开(公告)日：2005-10-25

申请号：NL1025104

申请日：2003-12-22

Applicant: INFINEON TECHNOLOGIES AG

Inventor： RUHL GUENTHER ,  PRECHTL GERHARD ,  SABISCH WINFRIED ,  KERSCH ALFRED ,  NESLADEK PAVEL ,  GANS FRITZ ,  ANDERSON REX

IPC: G03F1/00 ,  H01J37/32 ,  H01L21/00 ,  H01L21/687

公开(公告)号：DE10260645B3

公开(公告)日：2004-09-16

申请号：DE10260645

申请日：2002-12-23

Applicant: INFINEON TECHNOLOGIES AG

Inventor： RUHL GUENTHER ,  PRECHTL GERHARD DR ,  SABISCH WINFRIED ,  KERSCH ALFRED ,  NESLADEK PAVEL ,  GANS FRITZ ,  ANDERSON REX

IPC: G03F1/00 ,  H01J37/32 ,  H01L21/00 ,  H01L21/687 ,  H01L21/68 ,  H01L21/306

Abstract: The frame (2) has an inner contour for holding a substrate (1), a region (3a) of an upper main surface at a defined height above the substrate in the frame and a further region (3b) at essentially the same height as the plane of the upper main surface (1a) of the substrate in the frame. The inner profile is polygonal for accommodating the substrate and the further area of the upper main surface of the frame has different widths at different points.

公开(公告)号：NL1025104A1

公开(公告)日：2004-06-24

申请号：NL1025104

申请日：2003-12-22

Applicant: INFINEON TECHNOLOGIES AG

Inventor： RUHL GUENTHER ,  PRECHTL GERHARD ,  SABISCH WINFRIED ,  KERSCH ALFRED ,  NESLADEK PAVEL ,  GANS FRITZ ,  ANDERSON REX

IPC: G03F1/00 ,  H01J37/32 ,  H01L21/00 ,  H01L21/687