公开(公告)号：WO2005015611A3

公开(公告)日：2005-07-07

申请号：PCT/EP2004051399

申请日：2004-07-07

Applicant: INFINEON TECHNOLOGIES AG ,  PUCHER GERHARD ,  MATSCHITSCH MARTIN ,  FEICHTER HERWIG ,  GANITZER PAUL ,  HALLEGGER JOHANN

Inventor： PUCHER GERHARD ,  MATSCHITSCH MARTIN ,  FEICHTER HERWIG ,  GANITZER PAUL ,  HALLEGGER JOHANN

IPC: C09J7/02 ,  H01L21/68 ,  H01L21/683 ,  H01L21/687

CPC classification number: H01L21/6835

Abstract: The invention relates to a device for stabilising thin discs, in particular, for thin wafers (1), arranged on the circumference (2) of the thin wafer (1) as a support, the cross-section of which is formed from a profile (4) and the outer contour of which projects, at least slightly, over the thin wafer (1).

Abstract translation: 本发明在外围（2）薄晶片（1）被布置为支撑框架涉及用于薄盘的稳定化的装置，特别是薄的晶片（1），简档（4）的横截面形成的，其äubetaere轮廓薄晶片 （1）至少稍微突出。

公开(公告)号：DE10161902B4

公开(公告)日：2005-06-23

申请号：DE10161902

申请日：2001-12-17

Applicant: INFINEON TECHNOLOGIES AG

Inventor： MATSCHITSCH MARTIN ,  BINDER ALFRED ,  PUCHER GERHARD ,  KROUPA GERHARD ,  HIEBLER GUNTER

IPC: H01L21/00 ,  H01L21/68 ,  H01L21/683 ,  B65G47/91 ,  B25J15/00 ,  B81C3/00

公开(公告)号：AT328363T

公开(公告)日：2006-06-15

申请号：AT01128538

申请日：2001-11-29

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER KURT ,  BINDER ALFRED ,  KROUPA GERHARD ,  MATSCHITSCH MARTIN ,  PUCHER GERHARD ,  SCHERF WERNER ,  UNTERWEGER JOSEF ,  ZERLAUTH STEFAN

IPC: H01L21/683 ,  H01L21/00 ,  H01L21/68

Abstract: There is a first device (5), such as a nozzle opening into surface (25) facing the wafer, generating tensile forces towards the gripper (100), due to Bernouli's principle, by compressed gas. There is at least one second device (2,3) for holding the disc-shaped wafer on the gripper, due to electromagnetic field generated forces. The second device is designed to generate an electrostatic field and/or Coulomb's forces. The nozzle may be at a sharp angle, or parallel, to the surface, facing the wafer.

公开(公告)号：DE10145049C2

公开(公告)日：2003-10-16

申请号：DE10145049

申请日：2001-09-13

Applicant: INFINEON TECHNOLOGIES AG

Inventor： MATSCHITSCH MARTIN ,  BINDER ALFRED ,  MICHENTHALER NORBERT ,  PUCHER GERHARD ,  KROUPA GERHARD ,  AIGNER KURT

IPC: H01L21/683 ,  B25J15/06

公开(公告)号：DE502004007964D1

公开(公告)日：2008-10-16

申请号：DE502004007964

申请日：2004-01-26

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER KURT DR ,  BINDER ALFRED ,  MATSCHITSCH MARTIN ,  MICHENTHALER NORBERT ,  KROUPA GERHARD ,  PUCHER GERHARD

IPC: H01L21/68 ,  H01L21/683

公开(公告)号：DE10145049A1

公开(公告)日：2003-04-10

申请号：DE10145049

申请日：2001-09-13

Applicant: INFINEON TECHNOLOGIES AG

Inventor： MATSCHITSCH MARTIN ,  BINDER ALFRED ,  MICHENTHALER NORBERT ,  PUCHER GERHARD ,  KROUPA GERHARD ,  AIGNER KURT

IPC: H01L21/683 ,  B25J15/06

公开(公告)号：DE10161902A1

公开(公告)日：2003-07-10

申请号：DE10161902

申请日：2001-12-17

Applicant: INFINEON TECHNOLOGIES AG

Inventor： MATSCHITSCH MARTIN ,  BINDER ALFRED ,  PUCHER GERHARD ,  KROUPA GERHARD ,  HIEBLER GUNTER

IPC: H01L21/00 ,  H01L21/68 ,  H01L21/683 ,  B65G47/91 ,  B25J15/00 ,  B81C3/00

公开(公告)号：DE10062011A1

公开(公告)日：2002-06-27

申请号：DE10062011

申请日：2000-12-13

Applicant: INFINEON TECHNOLOGIES AG

Inventor： MATSCHITSCH MARTIN ,  PUCHER GERHARD ,  UNTERWEGER JOSEF ,  ZERLAUTH STEFAN ,  BINDER ALFRED ,  SCHERF WERNER ,  AIGNER KURT ,  KROUPA GERHARD

IPC: H01L21/683 ,  B65G54/02

Abstract: There is a first device (5), such as a nozzle opening into surface (25) facing the wafer, generating tensile forces towards the gripper (100), due to Bernouli's principle, by compressed gas. There is at least one second device (2,3) for holding the disc-shaped wafer on the gripper, due to electromagnetic field generated forces. The second device is designed to generate an electrostatic field and/or Coulomb's forces. The nozzle may be at a sharp angle, or parallel, to the surface, facing the wafer.

公开(公告)号：AT546832T

公开(公告)日：2012-03-15

申请号：AT02019577

申请日：2002-09-02

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER KURT ,  BINDER ALFRED ,  KROUPA GERHARD ,  MATSCHITSCH MARTIN ,  MICHENTHALER NORBERT ,  PUCHER GERHARD

IPC: H01L21/683

公开(公告)号：DE50014054D1

公开(公告)日：2007-03-29

申请号：DE50014054

申请日：2000-10-06

Applicant: INFINEON TECHNOLOGIES AG

Inventor： MATSCHITSCH MARTIN ,  PUCHER GERHARD ,  UNTERWEGER JOSEF ,  ZERLAUTH STEFAN ,  SCHERF WERNER ,  RUDOLPH CONNY-NORBERT ,  LADINIG MARCELLO ,  KROUPA GERHARD ,  BINDER ALFRED ,  GIOVANNINI ALBERTO ,  AIGNER KURT ,  MANZONI GIULIO

IPC: H01L21/00 ,  B25B11/00 ,  B65G47/00 ,  B66C1/00 ,  H01L21/683