公开(公告)号：AT328363T

公开(公告)日：2006-06-15

申请号：AT01128538

申请日：2001-11-29

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER KURT ,  BINDER ALFRED ,  KROUPA GERHARD ,  MATSCHITSCH MARTIN ,  PUCHER GERHARD ,  SCHERF WERNER ,  UNTERWEGER JOSEF ,  ZERLAUTH STEFAN

IPC: H01L21/683 ,  H01L21/00 ,  H01L21/68

Abstract: There is a first device (5), such as a nozzle opening into surface (25) facing the wafer, generating tensile forces towards the gripper (100), due to Bernouli's principle, by compressed gas. There is at least one second device (2,3) for holding the disc-shaped wafer on the gripper, due to electromagnetic field generated forces. The second device is designed to generate an electrostatic field and/or Coulomb's forces. The nozzle may be at a sharp angle, or parallel, to the surface, facing the wafer.

公开(公告)号：DE10144409B4

公开(公告)日：2004-11-18

申请号：DE10144409

申请日：2001-09-10

Applicant: INFINEON TECHNOLOGIES AG

Inventor： MATSCHITSCH MARTIN ,  BINDER ALFRED ,  UNTERWEGER JOSEF ,  KROUPA GERHARD

IPC: H01L21/00 ,  H01L21/683 ,  H01L21/687 ,  B25J15/06 ,  H01L21/68

公开(公告)号：DE10303460A1

公开(公告)日：2004-08-19

申请号：DE10303460

申请日：2003-01-29

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER KURT ,  BINDER ALFRED ,  MATSCHITSCH MARTIN ,  KALIN THOMAS ,  MAUNZ INGOMAR

IPC: B23Q3/18 ,  B24B37/34 ,  H01L21/68

公开(公告)号：DE10145049C2

公开(公告)日：2003-10-16

申请号：DE10145049

申请日：2001-09-13

Applicant: INFINEON TECHNOLOGIES AG

Inventor： MATSCHITSCH MARTIN ,  BINDER ALFRED ,  MICHENTHALER NORBERT ,  PUCHER GERHARD ,  KROUPA GERHARD ,  AIGNER KURT

IPC: H01L21/683 ,  B25J15/06

公开(公告)号：DE502004007964D1

公开(公告)日：2008-10-16

申请号：DE502004007964

申请日：2004-01-26

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER KURT DR ,  BINDER ALFRED ,  MATSCHITSCH MARTIN ,  MICHENTHALER NORBERT ,  KROUPA GERHARD ,  PUCHER GERHARD

IPC: H01L21/68 ,  H01L21/683

公开(公告)号：DE10145049A1

公开(公告)日：2003-04-10

申请号：DE10145049

申请日：2001-09-13

Applicant: INFINEON TECHNOLOGIES AG

Inventor： MATSCHITSCH MARTIN ,  BINDER ALFRED ,  MICHENTHALER NORBERT ,  PUCHER GERHARD ,  KROUPA GERHARD ,  AIGNER KURT

IPC: H01L21/683 ,  B25J15/06

公开(公告)号：AT546832T

公开(公告)日：2012-03-15

申请号：AT02019577

申请日：2002-09-02

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER KURT ,  BINDER ALFRED ,  KROUPA GERHARD ,  MATSCHITSCH MARTIN ,  MICHENTHALER NORBERT ,  PUCHER GERHARD

IPC: H01L21/683

公开(公告)号：DE50014054D1

公开(公告)日：2007-03-29

申请号：DE50014054

申请日：2000-10-06

Applicant: INFINEON TECHNOLOGIES AG

Inventor： MATSCHITSCH MARTIN ,  PUCHER GERHARD ,  UNTERWEGER JOSEF ,  ZERLAUTH STEFAN ,  SCHERF WERNER ,  RUDOLPH CONNY-NORBERT ,  LADINIG MARCELLO ,  KROUPA GERHARD ,  BINDER ALFRED ,  GIOVANNINI ALBERTO ,  AIGNER KURT ,  MANZONI GIULIO

IPC: H01L21/00 ,  B25B11/00 ,  B65G47/00 ,  B66C1/00 ,  H01L21/683

公开(公告)号：DE10062011B4

公开(公告)日：2005-02-24

申请号：DE10062011

申请日：2000-12-13

Applicant: INFINEON TECHNOLOGIES AG

Inventor： MATSCHITSCH MARTIN ,  PUCHER GERHARD ,  UNTERWEGER JOSEF ,  ZERLAUTH STEFAN ,  BINDER ALFRED ,  SCHERF WERNER ,  AIGNER KURT ,  KROUPA GERHARD

IPC: H01L21/683 ,  B65G54/02

Abstract: There is a first device (5), such as a nozzle opening into surface (25) facing the wafer, generating tensile forces towards the gripper (100), due to Bernouli's principle, by compressed gas. There is at least one second device (2,3) for holding the disc-shaped wafer on the gripper, due to electromagnetic field generated forces. The second device is designed to generate an electrostatic field and/or Coulomb's forces. The nozzle may be at a sharp angle, or parallel, to the surface, facing the wafer.

公开(公告)号：DE10303459A1

公开(公告)日：2004-08-19

申请号：DE10303459

申请日：2003-01-29

Applicant: INFINEON TECHNOLOGIES AG

Inventor： BINDER ALFRED ,  KROUPA GERHARD ,  KOBLINSKI CARSTEN VON ,  MATSCHITSCH MARTIN

IPC: H01L21/00 ,  H01L21/68 ,  H01L21/687 ,  G01N21/95