Patent search ap:("INFINEON TECHNOLOGIES AG") AND inv:"SCHMIDT-LANZ MARTIN" Page 1

1.

发明专利
Method for fastening substrate at substrate holder involves laying of first side of substrate on substrate holder, setting of first fluid pressure at first sub range of first side of substrate and setting of second fluid pressure 未知

公开(公告)号：DE102004061054A1

公开(公告)日：2006-07-06

申请号：DE102004061054

申请日：2004-12-18

Applicant: INFINEON TECHNOLOGIES AG

Inventor： BRUCH JENS , STAECKER JENS , HOMMEN HEIKO , SCHUMACHER KARL , SCHIWON ROBERTO , SCHMIDT-LANZ MARTIN , EFFERENN DIRK

IPC: H01L21/68 , G03F7/00

Abstract: The method involves laying of first side of substrate on substrate holder (10), setting of first fluid pressure at the first sub range (26,28,30) of first side of substrate and setting of second fluid pressure at the second sub range of the first side of the substrate. The setting of first fluid pressure and second fluid pressure are implemented after one another. An independent claim is also included for the substrate holding device.

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