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公开(公告)号:DE60011190D1
公开(公告)日:2004-07-08
申请号:DE60011190
申请日:2000-07-25
Applicant: INFINEON TECHNOLOGIES AG , IBM
Inventor: NARAYAN CHANDRASEKHAR , ARNDT KENNETH , KIRIHATA TOSHIAKI , DANIEL GABRIEL , LACHTRUPP DAVID , BRINTZINGER AXEL
IPC: H01L21/82 , H01H85/00 , H01H85/02 , H01H85/044 , H01H85/046 , H01L21/66 , H01L23/525 , H01L27/02
Abstract: A plurality of fuses of different types, each type of fuse serving a specific purpose are positioned on a semiconductor integrated circuit wafer, wherein activating one type of fuse does not incapacitate fuses of a different type. Fuses of the first type, e.g., laser activated fuses, are primarily used for repairing defects at the wafer level, whereas fuses of the second type, e.g., electrically activated fuses, are used for repairing defects found after mounting the IC chips on a module and stressing the module at burn-in test. Defects at the module level typically are single cell failures which are cured by the electrically programmed fuses to activate module level redundancies.
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公开(公告)号:DE60011190T2
公开(公告)日:2005-06-30
申请号:DE60011190
申请日:2000-07-25
Applicant: INFINEON TECHNOLOGIES AG , IBM
Inventor: NARAYAN CHANDRASEKHAR , ARNDT KENNETH , KIRIHATA TOSHIAKI , DANIEL GABRIEL , LACHTRUPP DAVID , BRINTZINGER AXEL
IPC: H01L21/82 , H01H85/00 , H01H85/02 , H01H85/044 , H01H85/046 , H01L21/66 , H01L23/525 , H01L27/02
Abstract: A plurality of fuses of different types, each type of fuse serving a specific purpose are positioned on a semiconductor integrated circuit wafer, wherein activating one type of fuse does not incapacitate fuses of a different type. Fuses of the first type, e.g., laser activated fuses, are primarily used for repairing defects at the wafer level, whereas fuses of the second type, e.g., electrically activated fuses, are used for repairing defects found after mounting the IC chips on a module and stressing the module at burn-in test. Defects at the module level typically are single cell failures which are cured by the electrically programmed fuses to activate module level redundancies.
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公开(公告)号:JP2001068555A
公开(公告)日:2001-03-16
申请号:JP2000210177
申请日:2000-07-11
Applicant: IBM , INFINEON TECHNOLOGIES CORP
Inventor: NARAYAN CHANDRASEKHAR , ARNDT KENNETH , LACHTRUPP DAVID , BRINTZINGER AXEL , GABRIEL DANIEL , KIRIHATA TOSHIAKI
IPC: H01L21/82 , H01H85/00 , H01H85/02 , H01H85/044 , H01H85/046 , H01L21/66 , H01L23/525 , H01L27/02
Abstract: PROBLEM TO BE SOLVED: To combine a laser actuation fuse with an electric starting fuse in order to increase total yield of product. SOLUTION: A plurality of different types of fuses 510, each serving a specified purpose, are arranged on a semiconductor integrated circuit wafer, such that a type of fuse can be actuated without missing the function of different types of fuses. A first type of fuse, e.g. a laser actuation fuse, is principally used for repairing a wafer level defect and a second type of fuse, e.g. an electric starting fuse, is used for repairing a defect found after an IC chip is mounted on a module and a stress is applied to the module during burn-in test. The module level defect is an unit cell trouble corrected normally by an electrically programmed fuse, in order to actuate a module level redundancy arrangement.
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