公开(公告)号：WO02054457A2

公开(公告)日：2002-07-11

申请号：PCT/US0143904

申请日：2001-11-14

Applicant: INFINEON TECHNOLOGIES CORP

Inventor： LIAN JINGYU ,  LIN CHENTING ,  NAGEL NICOLAS ,  WISE MICHAEL

IPC: H01L21/02

CPC classification number: H01L28/75 ,  H01L27/10852 ,  H01L27/11502 ,  H01L27/11507 ,  H01L28/55 ,  H01L28/65 ,  Y10S257/906 ,  Y10S257/908

Abstract: A multi-layer electrode (246) and method of fabrication thereof in which a conductive region (244) is separated from a barrier layer (222) by a first conductive liner (240) and a second conductive liner (242). First conductive layer (240) comprises Pt, and second conductive liner (242) comprises a thin layer of conductive oxide. The multi-layer electrode (246) prevents oxygen diffusion through the top conductive region (244) and reduces material variation during electrode patterning.

Abstract translation: 一种多层电极（246）及其制造方法，其中通过第一导电衬垫（240）和第二导电衬套（242）将导电区域（244）与阻挡层（222）分离。 第一导电层（240）包括Pt，并且第二导电衬垫（242）包括导电氧化物的薄层。 多层电极（246）防止氧扩散通过顶部导电区域（244）并且减少电极图案化期间的材料变化。