公开(公告)号：AU3517600A

公开(公告)日：2000-10-04

申请号：AU3517600

申请日：2000-03-08

Applicant: INPUT/OUTPUT INC

Inventor： RAGAN GLEN ,  WILSON DAVID ,  GANNON JEFFREY C ,  PHAM HAI T

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01V13/00

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

公开(公告)号：CA2368127A1

公开(公告)日：2000-09-21

申请号：CA2368127

申请日：2000-03-16

Applicant: INPUT OUTPUT INC

Inventor： RAGAN GLEN ,  WILSON DAVID ,  BEHN LAWRENCE P ,  DOWNEY JOHN C JR ,  CORRIGAN MICHAEL ARTHUR ,  GANNON JEFFERY C ,  CAIN BYRON LEE ,  ELDER KEITH ,  MCMAHON MICHAEL GEORGE ,  BEDNAR EUGENE D ,  LAMBERT DALE J ,  POLK HENRY THOMAS ,  ROCHE STEVEN L ,  MAXWELL PETER ,  BERTRAND WILFRED ROY

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01V1/00

Abstract: Method for operating and testing a sensor assembly (210). The sensor assembl y (210) preferably includes accelerometers with axes of sensitivity orthogonal to each other. The method preferably includes determining sensor tilt angle, determining the position of the sensor, and synchronizing the operation of t he sensor.

公开(公告)号：CA2368127C

公开(公告)日：2009-01-27

申请号：CA2368127

申请日：2000-03-16

Applicant: INPUT OUTPUT INC

Inventor： LAMBERT DALE J ,  POLK HENRY THOMAS ,  ROCHE STEVEN L ,  RAGAN GLEN ,  GANNON JEFFERY C ,  CORRIGAN MICHAEL ARTHUR ,  BERTRAND WILFRED ROY ,  DOWNEY JOHN C JR ,  ELDER KEITH ,  MCMAHON MICHAEL GEORGE ,  CAIN BYRON LEE ,  WILSON DAVID ,  MAXWELL PETER ,  BEDNAR EUGENE D ,  BEHN LAWRENCE P

IPC: G01P21/00 ,  G01V1/16 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/24 ,  G01V1/36 ,  G01V1/40 ,  G01V13/00 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00

Abstract: Method for operating and testing a sensor assembly (210). The sensor assembly (210) preferably includes accelerometers with axes of sensitivity orthogonal to each other. The method preferably includes determining sensor tilt angle, determining the position of the sensor, and synchronizing the operation of the sensor.

公开(公告)号：NO20014458A

公开(公告)日：2001-11-09

申请号：NO20014458

申请日：2001-09-14

Applicant: INPUT OUTPUT INC

Inventor： MAXWELL PETER ,  BEHN LAWRENCE P ,  BEDNAR EUGENE D ,  GANNON JEFFERY C ,  CORRIGAN MICHAEL ARTHUR ,  RAGAN GLEN ,  LAMBERT DALE J ,  POLK HENRY THOMAS ,  ROCHE STEVEN L ,  BERTRAND WILFRED ROY ,  WILSON DAVID ,  CAIN BYRON LEE ,  MCMAHON MICHAEL GEORGE ,  DOWNEY JR JOHN C ,  ELDER KEITH

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01V

CPC classification number: G01P1/023 ,  B81B3/001 ,  B81B3/0072 ,  B81B7/0016 ,  B81B2201/0235 ,  G01D11/245 ,  G01D18/008 ,  G01N2001/021 ,  G01P15/0802 ,  G01P15/13 ,  G01P21/00 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/181 ,  G01V1/186 ,  H01L2224/48472 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：NO20014459A

公开(公告)日：2001-11-16

申请号：NO20014459

申请日：2001-09-14

Applicant: INPUT OUTPUT INC

Inventor： RAGAN GLEN ,  WILSON DAVID ,  GANNON JEFFERY C ,  PHAM HAI T

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01V

CPC classification number: G01P1/023 ,  B81B3/001 ,  B81B3/0072 ,  B81B7/0016 ,  B81B2201/0235 ,  G01D11/245 ,  G01D18/008 ,  G01N2001/021 ,  G01P15/0802 ,  G01P15/13 ,  G01P21/00 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/181 ,  G01V1/186 ,  H01L2224/48472 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：NO20014459D0

公开(公告)日：2001-09-14

申请号：NO20014459

申请日：2001-09-14

Applicant: INPUT OUTPUT INC

Inventor： RAGAN GLEN ,  WILSON DAVID ,  GANNON JEFFERY C ,  PHAM HAI T

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01V

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

公开(公告)号：AU3751100A

公开(公告)日：2000-10-04

申请号：AU3751100

申请日：2000-03-16

Applicant: INPUT/OUTPUT INC

Inventor： MAXWELL PETER ,  BEHN LAWRENCE P ,  BEDNAR EUGENE D ,  GANNON JEFFERY C ,  CORRIGAN MICHAEL ARTHUR ,  RAGAN GLEN ,  LAMBERT DALE J ,  POLK HENRY THOMAS ,  ROCHE STEVEN L ,  BERTRAND WILFRED ROY ,  WILSON DAVID ,  CAIN BYRON LEE ,  MCMAHON MICHAEL GEORGE ,  DOWNEY JOHN C JR ,  ELDER KEITH

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01V1/00

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

公开(公告)号：CA2365886A1

公开(公告)日：2000-09-21

申请号：CA2365886

申请日：2000-03-08

Applicant: INPUT OUTPUT INC

Inventor： RAGAN GLEN ,  PHAM HAI T ,  GANNON JEFFREY C ,  WILSON DAVID

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01V13/00

Abstract: A plurality of seismic sensors calibration method (100) includes: an assembling so that sensors are coupled with each sensor positioned with its axis of sensitivity in a different spatial direction calibration system step (105), a rotating sensors step (110), a measuring sensors output signals ste p (115), a sensor output signal processing step (120) and a storing calibratio n coefficient(s) step (125).

公开(公告)号：NO20014459L

公开(公告)日：2001-11-16

申请号：NO20014459

申请日：2001-09-14

Applicant: INPUT OUTPUT INC

Inventor： RAGAN GLEN ,  WILSON DAVID ,  GANNON JEFFERY C ,  PHAM HAI T

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01V

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

公开(公告)号：NO20014458L

公开(公告)日：2001-11-09

申请号：NO20014458

申请日：2001-09-14

Applicant: INPUT OUTPUT INC

Inventor： MAXWELL PETER ,  BEHN LAWRENCE P ,  BEDNAR EUGENE D ,  GANNON JEFFERY C ,  CORRIGAN MICHAEL ARTHUR ,  RAGAN GLEN ,  LAMBERT DALE J ,  POLK HENRY THOMAS ,  ROCHE STEVEN L ,  BERTRAND WILFRED ROY ,  WILSON DAVID ,  CAIN BYRON LEE ,  MCMAHON MICHAEL GEORGE ,  DOWNEY JR JOHN C ,  ELDER KEITH

IPC: G01P21/00 ,  G01D11/24 ,  G01D18/00 ,  G01H1/00 ,  G01L27/00 ,  G01N1/02 ,  G01P1/02 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  G01V1/047 ,  G01V1/053 ,  G01V1/104 ,  G01V1/18 ,  G01V1/40 ,  H01L21/60 ,  H01L29/84 ,  H05K5/00 ,  G01V

Abstract: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).