公开(公告)号：JPH09292307A

公开(公告)日：1997-11-11

申请号：JP10797796

申请日：1996-04-26

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： NAKAMURA TOSHIO ,  OGAWA TOSHIAKI ,  SHIODA TOMOHIKO ,  OISHI KEIZO ,  YAMAMOTO AKIHIRO

IPC: G01N21/88 ,  G01M11/00 ,  G01N21/956 ,  G01N21/958

Abstract: PROBLEM TO BE SOLVED: To make it possible to detect the unevenness of color at a high speed by passing respective pixel data through a delay circuit, adding the data by pipeline processing and obtaining the luminance data of each pixel from compressed image data, in correspondence with the pixel at the same time. SOLUTION: The image data from a line sensor are made to be three sets of the pixel data, wherein the data are delayed for by each pixel for pipeline processing in a delay circuit 30. The data are added in adding circuits 31-33, respectively, stored in a memory 34 and inputted into a pixel extracting system 36 of a picture-element detecting circuit 24. At this time, the picture element position data are inputted into a control part 35 of an image-data compressing system. The delay circuit 30 and the respective adding circuits 31-33 are controlled, and the image data, which are added for every picture element, are controlled. At the same time, the picture element, which is acquired by the picture-element-data extracting system 36, is controlled. The picture element data, which are inputted into the picture-element detecting circuit 24, are synthesized as the screen information of a display 1. Noises, which are not related to the picture elements, are removed. The elements are divided into every picture element of each color (RGB). At the same time, the color unevenness of each color is detected.

公开(公告)号：JPH0989660A

公开(公告)日：1997-04-04

申请号：JP25072595

申请日：1995-09-28

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： YAMAMOTO AKIHIRO ,  NAKAMURA TOSHIO ,  OGAWA TOSHIAKI ,  SHIODA TOMOHIKO ,  OISHI KEIZO

IPC: G01J1/02 ,  G01J1/42

Abstract: PROBLEM TO BE SOLVED: To obtain a detection method in which the measuring error of luminance data on every pixel due to the deviation of the center line in the transverse direction of the pixel from the position of the pixel is reduced and in which the measuring error of luminance data on the pixel is reduced by faithfully integrating the output curve of the pixel. SOLUTION: In a method, a filter is constituted in such a way that rectangular pixels in an identical shape are arranged side by side in the transverse direction and the longitudinal direction, a plurality of detection elements are allocated to one pixel by using an image sensor composed of detection elements in an identical size which is smaller than that of the pixels, the luminance of the pixels is measured on the basis of their outputs, and the luminance of the color filter is detected. In this case, the output of the detection elements allocated to every pixel is set on the axis of ordinates and positions in the transverse direction of the respective detection elements are set on the axis of abscissas, an output curve which passes the outputs of the respective detection elements is found, and a value obtained by integrating the output curve in a definite range by making use of the center line in the transverse direction of every pixel as a reference is regarded as the one-dimensional luminance of every pixel.

公开(公告)号：JP2004301787A

公开(公告)日：2004-10-28

申请号：JP2003097543

申请日：2003-04-01

Applicant: Ishikawajima Harima Heavy Ind Co Ltd ,  石川島播磨重工業株式会社

Inventor： SHIODA TOMOHIKO ,  OGAWA TOSHIAKI ,  NAKAMURA TOSHIO ,  NAGANUMA TOSHIHIKO ,  KAWASHIMA HIDETSUGU

IPC: G01N21/88 ,  G01M11/00 ,  G02B5/20 ,  G02F1/13 ,  G02F1/1335

Abstract: PROBLEM TO BE SOLVED: To provide a substrate or panel inspection method, a substrate or panel inspection program and a substrate or panel inspection device which can improve the performance of detecting defects in an object to be inspected. SOLUTION: In place of a conventional substrate or a panel inspection method for detecting defects in the object to be inspected where a pattern transmitting light is evenly arranged, a new method arranges the object to be inspected in the visual field of a CCD camera and relatively moves it in a direction perpendicular to the row of pixels of the CCD camera, fetches the received light data of the CCD camera, in accordance with a specific trigger timing as a matrix data which is a two-dimensional assembly of values indicating the transmitted quantity of light of the object to be inspected, calculates a row representative value obtained by calculating the assembly of element values on the row for each row of the matrix data, and normalizes the element value in the line for each line of the matrix data, by using the row representative values. COPYRIGHT: (C)2005,JPO&NCIPI

公开(公告)号：JP2002181714A

公开(公告)日：2002-06-26

申请号：JP2000385118

申请日：2000-12-19

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： FUJIWARA TATSUO ,  HIROSE HIROKI ,  NAKAMURA TOSHIO ,  SHIODA TOMOHIKO

IPC: G01N21/84 ,  B65G51/03 ,  G01N21/958

Abstract: PROBLEM TO BE SOLVED: To provide a thin plate inspection device capable of feeding a thin plate without damaging the same, capable of easily correcting angular shift and capable of easily corresponding to a size change. SOLUTION: In the thin plate inspection device for feeding the thin plate 4 such as a liquid crystal substrate or the like to the inspection station 3 on a surface plate 2 to inspect the same, a thin plate transfer means 6 for grasping the front end 5 of the thin plate 4 to transfer the same on the surface plate 2, air sliders 7 provided on the surface plate 2 before and behind the inspection station 3 and floating the transferred thin plate 4 by air, and air bearings 8 provided to the inspection station 3 and performing the blowing and sucking of air with respect to the thin plate 4 at the same time to adjust the floating height of the thin plate 4, are provided.

公开(公告)号：JP2000028485A

公开(公告)日：2000-01-28

申请号：JP19292598

申请日：1998-07-08

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： ANDO HIDEYUKI ,  OGAWA TOSHIAKI ,  ENDO MAKOTO ,  SHIODA TOMOHIKO

IPC: G01M11/00 ,  G02B5/20

Abstract: PROBLEM TO BE SOLVED: To provide a method for adjusting alignment capable of accurately setting a substrate at an inspecting device even when there is dust on the substrate. SOLUTION: In this method, a substrate such as a color filter 2 is set at an inspecting device, and the substrate is moved relatively to a CCD line sensor. Then from image information of the CCD line sensor, the alignment of the substrate is adjusted for inspecting defects in the substrate. In this case, three groups of each of the edge locations 30 and 33 of two points separated at a predetermined interval from each other of the reference side 1 of the substrate along an edge 14 are detected by the above-mentioned CCD line sensor, and the median value of the angle of inclination obtained from the acquired data on the three groups is selected as the most provable value.

公开(公告)号：JP2000028486A

公开(公告)日：2000-01-28

申请号：JP19292698

申请日：1998-07-08

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： ANDO HIDEYUKI ,  OGAWA TOSHIAKI ,  SHIODA TOMOHIKO

IPC: G01M11/00 ,  G02B5/20 ,  G02F1/13 ,  G02F1/1335 ,  G06T1/00 ,  G06T7/00

Abstract: PROBLEM TO BE SOLVED: To provide a method capable of speedily processing even information in which raw image data is a large 16-bit data type or more without using a large amount of memory and reducing the amount of data without dropping out any of detailed defect information. SOLUTION: The raw image data 13 of a color filter is created so as to detect defects in the pixels of the color filter, and defects in the above-mentioned pixels are detected from the raw image data 13. The range Da of a defect level from which defects can be detected is set from the gradation range of the raw image data 13, and the range Da of a defect level is extracted from the raw image data 13. The extracted range Da of a defect level is converted into resolution in a minimum data type to create processed image data 16.

公开(公告)号：JPH10332532A

公开(公告)日：1998-12-18

申请号：JP13815897

申请日：1997-05-28

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： UENO HIKARI ,  OGAWA TOSHIAKI ,  SHIODA TOMOHIKO

IPC: G01M11/00 ,  G02B5/20 ,  G02F1/13 ,  G02F1/1335 ,  G09F9/00

Abstract: PROBLEM TO BE SOLVED: To suppress the amount of deflection of a substrate to be inspected to the depth of field of a CCD line camera in a color filter inspection device. SOLUTION: A mechanism 10 moves a color filter substrate 1 in X direction that is indicated by an arrow (g) and is located at the lower portion of the substrate 1. Transmission light that is transmitted through the substrate 1 from a light source (e) being extended in Y direction is located at the upper portion of the substrate 1 and is measured by a CCD line camera that is aligned in Y direction, thus inspecting the defect in color irregularity of RGB pixel. In this case, the mechanism 10 is provided at the periphery edge of an X table opening (d), has a support frame body 2 that is supported by sucking the periphery edge part of the substrate 1 and a plurality of support rollers 3 for supporting the lower surface of the substrate 1 while being aligned in each line in Y direction at both sides of a light source (e). The support roller 3 can be retracted so that it does not interfere with the approach of the peripheral edge in X direction of the opening (d).

公开(公告)号：JPH08128920A

公开(公告)日：1996-05-21

申请号：JP26655794

申请日：1994-10-31

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： NAKAMURA TOSHIO ,  OGAWA TOSHIAKI ,  SHIODA TOMOHIKO ,  OISHI KEIZO ,  MATSUO KENGO

IPC: G01M11/00 ,  G01N21/956 ,  G02F1/1335

Abstract: PURPOSE: To provide a color filter inspection equipment capable of detecting defects of an each pixel and detecting irregular color at the same time. CONSTITUTION: Color filter inspection equipment for optically inspecting each color pixel 2 in a color filter substrate 1 has an optical detecting device comprising a line light source 6 and a line sensor camera group 7 arranged in the main scanning direction on both sides of the color filter substrate 1. A stage synchronizing control device 10 which relatively moves the optical detecting device and the color filter substrate 1 in the sub-scanning direction and takes pixel information in the line sensor camera group 7 for every pixel in the sub- scanning direction and an image processing device group 9 which takes in image information from the line sensor camera group 7 and detects irregular color or defectives in each pixel 2 are installed.