公开(公告)号：JP2002280321A

公开(公告)日：2002-09-27

申请号：JP2001080526

申请日：2001-03-21

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： MASAKI MIYUKI ,  KAWAGUCHI NORIHITO ,  NISHIDA KENICHIRO ,  ISHII MIKITO ,  YOSHINOUCHI ATSUSHI ,  NARIMATSU AKITADA ,  HIROSE HIROKI ,  FUJIWARA TATSUO ,  ONO TOSHITAKA

IPC: B23K26/08 ,  B23K26/10 ,  B23K26/352 ,  B23K101/40 ,  H01L21/268 ,  H01L21/68 ,  H01L21/683 ,  B23K26/00

Abstract: PROBLEM TO BE SOLVED: To provide a laser annealing device suitable for a laser annealing method, in which a thin-film transistor formed on a substrate is irradiated with a laser beam which can penetrate the substrate from the substrate side. SOLUTION: Instead of a conventional laser annealing device in which a substrate is irradiated with laser, while a substrate is transported horizontally, so that a semiconductor film on a substrate surface is laser-annealed; there are provided a gas floating device comprising a front gas floating stage and a rear gas floating stage, which provided side by side with a prescribed interval in the transport direction, jet a gas from above the upper surface of the stage to make a substrate float by gas; a horizontal feeding device to feed the substrate floating on the gas astride the interval in the horizontal direction, and a laser optical system which emits laser beam upward through the interval.

公开(公告)号：JP2002187091A

公开(公告)日：2002-07-02

申请号：JP2000385119

申请日：2000-12-19

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： FUJIWARA TATSUO ,  HIROSE HIROKI ,  ENDO MAKOTO ,  KAWASAKI YOSHINORI

IPC: G01N21/84 ,  B25J15/00 ,  B25J15/08 ,  B25J17/02 ,  G01N21/958 ,  G02F1/13 ,  G02F1/1333

Abstract: PROBLEM TO BE SOLVED: To provide a method for holding a thin plate and a floating holding mechanism wherein the thin plate can be set on the holding mechanism from the upright direction and prevented from collision with a receiving surface of the holding mechanism without generating a bending stress and hindering restoration by a corrective force. SOLUTION: In the method for holding the thin plate wherein the thin plate 4 such as a liquid crystal substrate floating over a airslider 7 is held to be carried into an inspection station, the thin plate 4 is held by the holding member 16 while the height of the holding member 16 which holds the thin plate 4 is made to follow the floating height of the thin plate 4.

公开(公告)号：JP2001059928A

公开(公告)日：2001-03-06

申请号：JP23530999

申请日：1999-08-23

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND ,  ISHIKAWAJIMA SYSTEM TECHNOLOGY

Inventor： FUJIWARA TATSUO ,  ONO TOSHITAKA ,  NAKAJIMA SHINYA ,  MORI KOICHI ,  KIKUCHI KAZUYA

IPC: H01S3/086 ,  G02B7/00 ,  G02B7/198

Abstract: PROBLEM TO BE SOLVED: To improve positioning stability of a shifting plate and angle reproducibility, and precisely perform angle adjustment of an optical element in a three-point supporting method of a disc spring. SOLUTION: The gate plate 15 to which the optical element is attached is confronted to a base plate 16. A first fulcrum part O1, a second fulcrum part O2 and a third fulcrum part O3 are defined on respective vertex positions of a triangle which surrounds the optical element. A constant pressure supporting mechanism 19 which consists of a disc spring 28, a spherical bearing 24, a ring nut 26 and a fastening bolt 25, etc., is assembled on the first fulcrum part O1. Shifting adjusting mechanisms 20, 21 which are provided with a disc spring 41, a spherical bearing 31, a bushing 32, a female screw block 33, a locking nut 39 and an adjusting screw 36 which is inserted thereto and fastens the same are assembled to the second fulcrum part O2 and the third fulcrum part O3.

公开(公告)号：JP2003205480A

公开(公告)日：2003-07-22

申请号：JP2002004843

申请日：2002-01-11

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： SONEHARA MITSUHARU ,  KOBAYASHI KENGO ,  TANAKA KOICHI ,  MIURA YUICHI ,  FUJIWARA TATSUO

IPC: B25J5/00

Abstract: PROBLEM TO BE SOLVED: To provide a caster type mobile robot with favorable traveling performance capable of easily climbing up and down stairs or the like. SOLUTION: A center leg 11 is attached to a center of a body 10 so as to extend and contract. A center driving wheel 22 is provided on a lower end of the center leg 11. Side legs 13 are provided on both right and left sides of the body 10 so as to turn, extend and contract with respect to the body 10. Side part driving wheels 34 are provided on the side legs 13. COPYRIGHT: (C)2003,JPO

公开(公告)号：JP2002181714A

公开(公告)日：2002-06-26

申请号：JP2000385118

申请日：2000-12-19

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： FUJIWARA TATSUO ,  HIROSE HIROKI ,  NAKAMURA TOSHIO ,  SHIODA TOMOHIKO

IPC: G01N21/84 ,  B65G51/03 ,  G01N21/958

Abstract: PROBLEM TO BE SOLVED: To provide a thin plate inspection device capable of feeding a thin plate without damaging the same, capable of easily correcting angular shift and capable of easily corresponding to a size change. SOLUTION: In the thin plate inspection device for feeding the thin plate 4 such as a liquid crystal substrate or the like to the inspection station 3 on a surface plate 2 to inspect the same, a thin plate transfer means 6 for grasping the front end 5 of the thin plate 4 to transfer the same on the surface plate 2, air sliders 7 provided on the surface plate 2 before and behind the inspection station 3 and floating the transferred thin plate 4 by air, and air bearings 8 provided to the inspection station 3 and performing the blowing and sucking of air with respect to the thin plate 4 at the same time to adjust the floating height of the thin plate 4, are provided.

公开(公告)号：JP2001083440A

公开(公告)日：2001-03-30

申请号：JP25568099

申请日：1999-09-09

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： FUJIWARA TATSUO ,  ONO TOSHITAKA ,  FUKUTOMI SEIJI

IPC: B23K26/064 ,  G02B26/08 ,  H01S3/101

Abstract: PROBLEM TO BE SOLVED: To improve the position reproduction accuracy of a mirror holder even when the mirror holder is switched in such a manner that the switching of the mirror holder can be executed at a high speed. SOLUTION: This optical path switching device is provided with a forward and backward movable cam frame 18 formed with a cam prove 19, an arm 23 which is made turnable via the cam groove 19 by the forward and backward movement of the cam frame 18, a gear 25 which is made turnable back and for the integrally with the arm 23, a gear 8 formed to be forward and backward movable by a the gear 25, a reflection mirror 7 which is mounted via a mirror holder 6 at a mirror mounting shaft 5 provided with the gear 8 in such a manner that mirror can turn integrally with the mirror mounting shaft 5, a mirror holder positioning device which positions the mirror holder 6 when the reflection mirror 7 is so switched as to reflect a laser beam 29 and an arm pressing device 41 which eliminates the shaking of the gears 25 and 8 by pressing the arm 23.

公开(公告)号：JP2001066459A

公开(公告)日：2001-03-16

申请号：JP24308499

申请日：1999-08-30

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： NAKAJIMA SHINYA ,  FUJIWARA TATSUO ,  KANAZAWA YUKO ,  UEHARA MINORU

IPC: G02B6/32 ,  G02B6/42

Abstract: PROBLEM TO BE SOLVED: To obtain the structure of a fiber holder wherein maintainability is improved by individually, easily and rapidly replacing respective parts such as a holder body, a fiber sleeve into which an optical fiber is inserted and a condensing lens protective glass in the case of replacing these respective parts. SOLUTION: Condensing lens protective glass 21 which is provided in the downstream side in the advancing direction 5 of the laser beam of a condensing lens 31 so as to be vertically moved via a slide plate 19, an optical path duct 4 which is provided in the downstream side in the advancing direction 5 of the laser beam of a lens unit 27 of the condensing lens protective glass 21 so that a laser beam 17 passes through, frame 6, 8 which are provided in the downstream side in the advancing direction 5 of the laser beam of the optical path duct 4, and a fiber sleeve 10 which is housed into a hollow hole 9 pierced in the frame 8 and into whose internal part an optical fiber 13 is inserted are detachably attached to a prescribed frame 2.

公开(公告)号：JP2001021790A

公开(公告)日：2001-01-26

申请号：JP18959899

申请日：1999-07-02

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： FUJIWARA TATSUO ,  ONO TOSHITAKA ,  NAKAJIMA SHINYA

IPC: H01S3/086 ,  G02B7/00 ,  G02B7/198

Abstract: PROBLEM TO BE SOLVED: To enhance positional stability and angle reproducibility for a flap plate. SOLUTION: A flap plate 16 fitted with an optical element is faced to a base plate 17. The first support part O1, the second support part O2 and the third support part O3 are fixed in respective vertex positions of a triangle surrounding the optical element. A constant pressure supporting mechanism comprising a spherical bearing, a fastening bolt and the like is assembled to the first support part O1. Flap adjusting mechanisms 19, 20 each comprising spherical bearings 29a, 29b provided in through-hole 27, 30 parts of the flap plate 16, a compression spring 35 interposed between the flap plate 16 and the base plate 17, an adjusting screw 38 and the like are assembled to the second support part O2 and the third support part O3. A flap angle of the flap plate 16 is adjusted by advancing and retreating of the adjusting screws 38.

公开(公告)号：JP2003310511A

公开(公告)日：2003-11-05

申请号：JP2002117287

申请日：2002-04-19

Applicant: Ishikawajima Harima Heavy Ind Co Ltd ,  石川島播磨重工業株式会社

Inventor： TATEISHI ATSUSHI ,  HIROSE NAOYA ,  FUJIWARA TATSUO

IPC: A47L9/04 ,  A46B13/02 ,  A47L11/202

Abstract: PROBLEM TO BE SOLVED: To provide a cleaning apparatus having a simple structure, capable of reducing a non-cleanable portion and capable of cleaning joints in all directions efficiently.
SOLUTION: In the cleaning apparatus 1 by which a floor surface 2, a wall surface or the like is cleaned by a cleaning brush 3 to be driven along the floor surface 2, the wall surface or the like, at least two or more rotary shafts 6 linked to a rotary motor 5 for driving the cleaning brush 3 are provided, and the cleaning brush 3 is mounted over the plurality of rotary shafts 6, thereby allowing the cleaning brush 3 to move in a parallel link state.
COPYRIGHT: (C)2004,JPO

Abstract translation: 要解决的问题：提供一种具有简单结构的清洁装置，能够有效地减少不可清洁部分并能够在各个方向上清洁接头。 解决方案：在清洁装置1中，通过清洁刷3清洁地板表面2，壁面等，以沿着地板表面2，壁表面等驱动，至少两个或 设有与用于驱动清扫刷3的旋转马达5连接的更多的旋转轴6，并且清洁刷3安装在多个旋转轴6上，从而允许清洁刷3以平行连杆的状态移动。 版权所有（C）2004，JPO

公开(公告)号：JP2002231654A

公开(公告)日：2002-08-16

申请号：JP2001021032

申请日：2001-01-30

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： KAWAGUCHI NORIHITO ,  MASAKI MIYUKI ,  YOSHINOUCHI ATSUSHI ,  NARIMATSU AKITADA ,  ONO TOSHITAKA ,  FUJIWARA TATSUO ,  HIROSE HIROKI

IPC: H01L21/20 ,  H01L21/265 ,  H01L21/268 ,  H01L21/336 ,  H01L29/786

Abstract: PROBLEM TO BE SOLVED: To provide a method and an apparatus for laser annealing, capable of surely activating a polysilicon of a part formed with an electrode even when an electrode film is formed on the polysilicon and hence enhancing activity of a silicon after doping to a maximum limit, and having the possibility of small distortion of a substrate with a short processing time. SOLUTION: The method for laser annealing comprises the steps of irradiating a laser beam, capable of passing through the substrate from the substrate side to a thin-film transistor 2 formed on the substrate 1, and activating the polysilicon 3 for constituting the thin film transistor. The substrate 1 is a glass substrate, a plastic substrate or a quarts substrate. The wavelength of the beam 10 is in the range of 300 to 900 nm.