公开(公告)号：JPH09142811A

公开(公告)日：1997-06-03

申请号：JP31071395

申请日：1995-11-29

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： YAMAMOTO KATSUHARU ,  SHIDARA KAZUHIRO ,  HIROSE HIROKI

IPC: C01B13/11 ,  H01T23/00

Abstract: PROBLEM TO BE SOLVED: To easily and inexpensively provide an ozonizer of high reliability. SOLUTION: First, a reactor 4 is constructed by laminating flat plate electrodes 1 vertically in tiers and providing, compartment-fashion, discharge gaps 3 for generating ozone between the respective electrodes 1. Next, the flat plate electrodes 1, 1 situated respectively on the uppermost and lowermost parts of the reactor 4 are provided with a feedstock gas inlet 8 and ozone outlet 9, respectively. Secondly, communicating holes 10 are bored in the respective flat electrodes 1 situated between the uppermost and lowermost flat plate electrodes so as to allow the discharge gaps 3 to communicate with one another. Finally, a feedstock gas feed pipe 8a and an ozone extraction pipe 9a are connected to the feedstock gas inlet 8 and the ozone outlet 9, respectively.

公开(公告)号：JP2002231654A

公开(公告)日：2002-08-16

申请号：JP2001021032

申请日：2001-01-30

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： KAWAGUCHI NORIHITO ,  MASAKI MIYUKI ,  YOSHINOUCHI ATSUSHI ,  NARIMATSU AKITADA ,  ONO TOSHITAKA ,  FUJIWARA TATSUO ,  HIROSE HIROKI

IPC: H01L21/20 ,  H01L21/265 ,  H01L21/268 ,  H01L21/336 ,  H01L29/786

Abstract: PROBLEM TO BE SOLVED: To provide a method and an apparatus for laser annealing, capable of surely activating a polysilicon of a part formed with an electrode even when an electrode film is formed on the polysilicon and hence enhancing activity of a silicon after doping to a maximum limit, and having the possibility of small distortion of a substrate with a short processing time. SOLUTION: The method for laser annealing comprises the steps of irradiating a laser beam, capable of passing through the substrate from the substrate side to a thin-film transistor 2 formed on the substrate 1, and activating the polysilicon 3 for constituting the thin film transistor. The substrate 1 is a glass substrate, a plastic substrate or a quarts substrate. The wavelength of the beam 10 is in the range of 300 to 900 nm.

公开(公告)号：JPH10338504A

公开(公告)日：1998-12-22

申请号：JP14920097

申请日：1997-06-06

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： YAMAMOTO KATSUHARU ,  KAMASE YUKIHIRO ,  SHIDARA KAZUHIRO ,  HIROSE HIROKI ,  KONDO AKINOBU ,  SUZUKI TAKAHISA

IPC: C01B13/11 ,  H01T23/00

Abstract: PROBLEM TO BE SOLVED: To prevent the plastic deformation of a spacer and to improve the operability in assembling. SOLUTION: A spacer 4 is provided between a couple of opposed plate electrodes 1, and a discharge gap 6 is formed at the central part of the spacer 4 to constitute an ozonizer. The spacer 4 is made of a fluororesin, the plate electrodes 1 are bonded to the spacer 4 with an adhesive 5, and the discharge gap 6 is kept airtight without vertically pressing the electrodes 1 with a great pressure.

公开(公告)号：JPH11292516A

公开(公告)日：1999-10-26

申请号：JP9175298

申请日：1998-04-03

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： NAKASHIZU TAMIRO ,  YAMAMOTO KATSUHARU ,  KAMASE YUKIHIRO ,  SHIDARA KAZUHIRO ,  HIROSE HIROKI ,  SUZUKI TAKAHISA

IPC: C01B13/11

Abstract: PROBLEM TO BE SOLVED: To provide an ozone generating device capable of making a structure of a unit simple and highly reliable and reducing the cost of the device by reducing a number of a joints. SOLUTION: Relating to the ozone generating device, the first plate-shaped electrode 110h and the second plate-shaped electrode 110e in which a refrigerant passage 119 in which the refrigerant for cooling the electrode is passed through is formed at the inside are laminated in multistage while interposing a discharge gap, and ozone is generated between the discharge gap by impressing high voltage between the electrodes 110h and 110e. In such a case, an extending part 115 which does not lap each other in horizontal projection is formed respectively at the electrodes 110h and 110e, and a spacer block 70 in which the refrigerant passage 77 communicating the refrigerant passage 119 of the first electrode 110h with each other and the refrigerant passage 119 of the second electrode 110e with each other are formed is interposed between the extending part 115, and also a refrigerant supply means 80 and a refrigerant discharge means 90 are connected respectively to the refrigerant passage 77.

公开(公告)号：JPH11268901A

公开(公告)日：1999-10-05

申请号：JP7762198

申请日：1998-03-25

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： NAKASHIZU TAMIRO ,  YAMAMOTO KATSUHARU ,  KAMASE YUKIHIRO ,  SHIDARA KAZUHIRO ,  HIROSE HIROKI ,  SUZUKI TAKAHISA

IPC: C01B13/11 ,  H01T23/00

Abstract: PROBLEM TO BE SOLVED: To provide a low-cost ozonizer having high reliability by removing spacers from discharge surfaces and reducing connecting terminals, metallic fixtures, etc., for mutual electrodes and the number of parts. SOLUTION: This ozonizer is obtained by respectively forming each overhanging part 115 in each first planar electrode 110h and each second planar electrode 110e without mutually overlapping when viewed in a plane, respectively interposing spacer blocks 70 between the overhanging parts 115 of the first electrode 110h and the second electrode 110e and laminating the electrodes in many stages in the ozonizer prepared by laminating the first planar electrodes 110h and the second planar electrodes 110e through discharge gaps in many stages, applying a high voltage across the electrodes and producing ozone between the discharge gaps.

公开(公告)号：JP2002181714A

公开(公告)日：2002-06-26

申请号：JP2000385118

申请日：2000-12-19

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： FUJIWARA TATSUO ,  HIROSE HIROKI ,  NAKAMURA TOSHIO ,  SHIODA TOMOHIKO

IPC: G01N21/84 ,  B65G51/03 ,  G01N21/958

Abstract: PROBLEM TO BE SOLVED: To provide a thin plate inspection device capable of feeding a thin plate without damaging the same, capable of easily correcting angular shift and capable of easily corresponding to a size change. SOLUTION: In the thin plate inspection device for feeding the thin plate 4 such as a liquid crystal substrate or the like to the inspection station 3 on a surface plate 2 to inspect the same, a thin plate transfer means 6 for grasping the front end 5 of the thin plate 4 to transfer the same on the surface plate 2, air sliders 7 provided on the surface plate 2 before and behind the inspection station 3 and floating the transferred thin plate 4 by air, and air bearings 8 provided to the inspection station 3 and performing the blowing and sucking of air with respect to the thin plate 4 at the same time to adjust the floating height of the thin plate 4, are provided.

公开(公告)号：JPH11310403A

公开(公告)日：1999-11-09

申请号：JP12093098

申请日：1998-04-30

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： NAKASHIZU TAMIRO ,  YAMAMOTO KATSUHARU ,  KAMASE YUKIHIRO ,  SHIDARA KAZUHIRO ,  HIROSE HIROKI ,  SUZUKI TAKAHISA

IPC: C01B13/11

Abstract: PROBLEM TO BE SOLVED: To provide an ozonizer capable of efficiently generating ozone. SOLUTION: This ozonizer is so designed that 1st flat plate electrodes 10 and 2nd flat plate electrodes 20 are mutually laminated in tiers via discharge gaps, a high voltage is applied respectively between the 1st and 2nd electrodes 10, 20 to generate ozone in the gaps, wherein the lateral side 19 of both the 1st and 2nd electrodes 10, 20 is provided with side support members 35 supporting the corresponding electrodes 10, 20 perpendicularly in the laminating direction, and an electrode support frame 33 is provided as well so as to support the side support members 35 in the laminating direction.

公开(公告)号：JPH08192298A

公开(公告)日：1996-07-30

申请号：JP556795

申请日：1995-01-18

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： HIROSE HIROKI ,  MURAKAMI HIROKI ,  TAKAHASHI YOSHIO

IPC: B21D37/04 ,  B30B13/00 ,  B30B15/02

Abstract: PURPOSE: To save the space and improve the efficiency in the exchange of cushion pins by attaching a multi-axes manipulator to a movable truck and laying the track of the movable truck in a manner approachable to a bolster plate. CONSTITUTION: A movable truck 1 storing cushion pins for exchange is loaded with a manipulator 2 consisting of a robot with at least five degrees of freedom (axes), cushion pin storing cassette 3 with a number of storing holes, and cylindrical unit 4 for storing lids. The movable truck 1 is provided with wheels 5, running on the floor of a plant installed with a transfer press. The truck 1 stops at a position close to the transfer press side of a bolster plate 11, performing the exchange of cushion pins. The bolster plate 11 is provided with a number of holes 14 to insert cushion pins 13, and the holes 14 are each covered with a lid 15. A camera 6 is provided above the bolster plate 11, monitoring the exchange of the cushion pins.

公开(公告)号：JP2002280321A

公开(公告)日：2002-09-27

申请号：JP2001080526

申请日：2001-03-21

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： MASAKI MIYUKI ,  KAWAGUCHI NORIHITO ,  NISHIDA KENICHIRO ,  ISHII MIKITO ,  YOSHINOUCHI ATSUSHI ,  NARIMATSU AKITADA ,  HIROSE HIROKI ,  FUJIWARA TATSUO ,  ONO TOSHITAKA

IPC: B23K26/08 ,  B23K26/10 ,  B23K26/352 ,  B23K101/40 ,  H01L21/268 ,  H01L21/68 ,  H01L21/683 ,  B23K26/00

Abstract: PROBLEM TO BE SOLVED: To provide a laser annealing device suitable for a laser annealing method, in which a thin-film transistor formed on a substrate is irradiated with a laser beam which can penetrate the substrate from the substrate side. SOLUTION: Instead of a conventional laser annealing device in which a substrate is irradiated with laser, while a substrate is transported horizontally, so that a semiconductor film on a substrate surface is laser-annealed; there are provided a gas floating device comprising a front gas floating stage and a rear gas floating stage, which provided side by side with a prescribed interval in the transport direction, jet a gas from above the upper surface of the stage to make a substrate float by gas; a horizontal feeding device to feed the substrate floating on the gas astride the interval in the horizontal direction, and a laser optical system which emits laser beam upward through the interval.

公开(公告)号：JP2002187091A

公开(公告)日：2002-07-02

申请号：JP2000385119

申请日：2000-12-19

Applicant: ISHIKAWAJIMA HARIMA HEAVY IND

Inventor： FUJIWARA TATSUO ,  HIROSE HIROKI ,  ENDO MAKOTO ,  KAWASAKI YOSHINORI

IPC: G01N21/84 ,  B25J15/00 ,  B25J15/08 ,  B25J17/02 ,  G01N21/958 ,  G02F1/13 ,  G02F1/1333

Abstract: PROBLEM TO BE SOLVED: To provide a method for holding a thin plate and a floating holding mechanism wherein the thin plate can be set on the holding mechanism from the upright direction and prevented from collision with a receiving surface of the holding mechanism without generating a bending stress and hindering restoration by a corrective force. SOLUTION: In the method for holding the thin plate wherein the thin plate 4 such as a liquid crystal substrate floating over a airslider 7 is held to be carried into an inspection station, the thin plate 4 is held by the holding member 16 while the height of the holding member 16 which holds the thin plate 4 is made to follow the floating height of the thin plate 4.